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Journal: Sensors, 2008
Volume: 8
Number: 2317

Article: A Micromachined Capacitive Pressure Sensor Using a Cavity-Less Structure with Bulk-Metal/Elastomer Layers and Its Wireless Telemetry Application
Authors: by Kenichi Takahata and Yogesh B. Gianchandani
Link: https://www.mdpi.com/1424-8220/8/4/2317

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