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Journal: Sensors, 2006
Volume: 6
Number: 361
Article:
“Microstructured Nanostructures” – Nanostructuring by Means of Conventional Photolithography and Layer-expansion Technique
Authors:
by
Johannes Platen, Arshak Poghossian and Michael J. Schöning
Link:
https://www.mdpi.com/1424-8220/6/4/361
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