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Journal: Sensors, 2024
Volume: 24
Number: 5071
Article:
Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications
Authors:
by
Jong-Jin Hwang, Hyo-Jun Sim and Seung-Jae Moon
Link:
https://www.mdpi.com/1424-8220/24/15/5071
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