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Journal: Sensors, 2024
Volume: 24
Number: 4000
Article:
Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source
Authors:
by
Yuichi Kurashima, Atsuhiko Maeda, Naoto Oshima, Taisei Motomura, Takashi Matsumae, Mitsuhiro Watanabe and Hideki Takagi
Link:
https://www.mdpi.com/1424-8220/24/12/4000
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