A Fabry–Perot Sensor with Cascaded Polymer Films Based on Vernier Effect for Simultaneous Measurement of Relative Humidity and Temperature
Abstract
:1. Introduction
2. Sensor Fabrication and Working Principle
3. Experimental Results and Discussion
3.1. Humidity Response of the Sensor
3.2. Temperature Response of the Sensor
3.3. Simultaneous Measurement Method
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Reference | Configuration | RH Range | RH Sensitivity | Temperature Range | Temperature Sensitivity |
---|---|---|---|---|---|
[15] | Two C-shaped FPIs | 20%RH to 45%RH | −128 pm/%RH, 38 pm/%RH | 15 °C to 45 °C | 22 pm/°C, 722 pm/°C |
[16] | coated POFBG | 30%RH to 95%RH | 11.8 pm/%RH, 13.7 pm/%RH | 22 °C to 37 °C | −63.2 pm/°C, -- |
[17] | FPI+MZI | 27.83%RH to 76.17%RH, | −132 pm/%RH, 72 pm/%RH | 22.8 °C to 32.8 °C | 172 pm/°C, 370 pm/°C |
[18] | FPI+FBG | 20%RH to 90%RH | 22.07 pm/%RH, 0 | 15 °C to 65 °C | 25.14 pm/°C, 9.98 pm/°C |
This work | Two cascaded FPIs | 20%RH to 90%RH | 378.6 pm/%RH, 387.3 pm/%RH 1 | 15 °C to 40 °C | −482.5 pm/°C, 533.0 pm/°C 2 |
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Zhang, T.; Han, Q.; Liang, Z.; Jiang, J.; Cheng, Z. A Fabry–Perot Sensor with Cascaded Polymer Films Based on Vernier Effect for Simultaneous Measurement of Relative Humidity and Temperature. Sensors 2023, 23, 2800. https://doi.org/10.3390/s23052800
Zhang T, Han Q, Liang Z, Jiang J, Cheng Z. A Fabry–Perot Sensor with Cascaded Polymer Films Based on Vernier Effect for Simultaneous Measurement of Relative Humidity and Temperature. Sensors. 2023; 23(5):2800. https://doi.org/10.3390/s23052800
Chicago/Turabian StyleZhang, Teng, Qun Han, Zhizhuang Liang, Junfeng Jiang, and Zhenzhou Cheng. 2023. "A Fabry–Perot Sensor with Cascaded Polymer Films Based on Vernier Effect for Simultaneous Measurement of Relative Humidity and Temperature" Sensors 23, no. 5: 2800. https://doi.org/10.3390/s23052800