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Journal: Sensors, 2023
Volume: 23
Number: 1276

Article: A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy
Authors: by Shuo Chen, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu and Shinan Wang
Link: https://www.mdpi.com/1424-8220/23/3/1276

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