Order Article Reprints

Chen S, Feng L, Guo S, Ji Y, Zeng S, Peng X, Xu Y, Hu T, Wu Z, Wang S. A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy. Sensors. 2023; 23(3):1276. https://doi.org/10.3390/s23031276

Chen, Shuo, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu, and Shinan Wang. 2023. "A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy" Sensors 23, no. 3: 1276. https://doi.org/10.3390/s23031276

Chen, S., Feng, L., Guo, S., Ji, Y., Zeng, S., Peng, X., Xu, Y., Hu, T., Wu, Z., & Wang, S. (2023). A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy. Sensors, 23(3), 1276. https://doi.org/10.3390/s23031276