Park, Y.; Liu, P.; Lee, S.; Cho, J.; Joo, E.; Kim, H.-U.; Kim, T.
Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD. Sensors 2023, 23, 5563.
https://doi.org/10.3390/s23125563
AMA Style
Park Y, Liu P, Lee S, Cho J, Joo E, Kim H-U, Kim T.
Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD. Sensors. 2023; 23(12):5563.
https://doi.org/10.3390/s23125563
Chicago/Turabian Style
Park, Yonggyun, Pengzhan Liu, Seunghwan Lee, Jinill Cho, Eric Joo, Hyeong-U Kim, and Taesung Kim.
2023. "Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD" Sensors 23, no. 12: 5563.
https://doi.org/10.3390/s23125563
APA Style
Park, Y., Liu, P., Lee, S., Cho, J., Joo, E., Kim, H.-U., & Kim, T.
(2023). Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD. Sensors, 23(12), 5563.
https://doi.org/10.3390/s23125563