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Journal: Sensors, 2022
Volume: 22
Number: 1056

Article: Electrostatic-Fluid-Structure 3D Numerical Simulation of a MEMS Electrostatic Comb Resonator
Authors: by Zhanqing Yu, Shiping Chen, Ya Mou and Fade Hu
Link: https://www.mdpi.com/1424-8220/22/3/1056

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