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Article

Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation

1
Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Korea
2
Samsung Electronics, Hwaseong-si 18448, Korea
3
Institute of Quantum Systems (IQS), Chungnam National University, Daejeon 34134, Korea
*
Author to whom correspondence should be addressed.
Academic Editor: Bruno Goncalves
Sensors 2022, 22(15), 5871; https://doi.org/10.3390/s22155871
Received: 24 June 2022 / Revised: 28 July 2022 / Accepted: 4 August 2022 / Published: 5 August 2022
(This article belongs to the Special Issue Plasma Diagnostics)
As the conventional voltage and current (VI) probes widely used in plasma diagnostics have separate voltage and current sensors, crosstalk between the sensors leads to degradation of measurement linearity, which is related to practical accuracy. Here, we propose a VI probe with a floating toroidal coil that plays both roles of a voltage and current sensor and is thus free from crosstalk. The operation principle and optimization conditions of the VI probe are demonstrated and established via three-dimensional electromagnetic wave simulation. Based on the optimization results, the proposed VI probe is fabricated and calibrated for the root-mean-square (RMS) voltage and current with a high-voltage probe and a vector network analyzer. Then, it is evaluated through a comparison with a commercial VI probe, with the results demonstrating that the fabricated VI probe achieved a slightly higher linearity than the commercial probe: R2 of 0.9967 and 0.9938 for RMS voltage and current, respectively. The proposed VI probe is believed to be applicable to plasma diagnostics as well as process monitoring with higher accuracy. View Full-Text
Keywords: plasma diagnostics; plasma monitoring; voltage and current (VI) probe; floating toroidal coil; simulation optimization; VI probe calibration plasma diagnostics; plasma monitoring; voltage and current (VI) probe; floating toroidal coil; simulation optimization; VI probe calibration
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MDPI and ACS Style

Kim, S.-j.; Seong, I.-h.; Lee, Y.-s.; Cho, C.-h.; Jeong, W.-n.; You, Y.-b.; Lee, J.-j.; You, S.-j. Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation. Sensors 2022, 22, 5871. https://doi.org/10.3390/s22155871

AMA Style

Kim S-j, Seong I-h, Lee Y-s, Cho C-h, Jeong W-n, You Y-b, Lee J-j, You S-j. Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation. Sensors. 2022; 22(15):5871. https://doi.org/10.3390/s22155871

Chicago/Turabian Style

Kim, Si-jun, In-ho Seong, Young-seok Lee, Chul-hee Cho, Won-nyoung Jeong, Ye-bin You, Jang-jae Lee, and Shin-jae You. 2022. "Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation" Sensors 22, no. 15: 5871. https://doi.org/10.3390/s22155871

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