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Sensors 2002, 2(2), 50-61;

A Ceramic Thick Film Humidity Sensor Based on MnZn Ferrite

Microelectronics and Semiconductor Research Group, ECE Department, National Technological Park, University of Limerick, Limerick, Ireland
Author to whom correspondence should be addressed.
Received: 6 February 2002 / Accepted: 8 February 2002 / Published: 22 February 2002
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A ceramic thick film humidity sensor, produced from MnZn ferrite, is presented. The proposed sensing mechanism is a combination of proton hopping, hydronium diffusion, and vacancy donor traps releasing electrons into the conduction band. The sensor structure comprises a two-layer device; the first layer is an interdigitated conductor and the second layer is a 30μm thick sensing layer. The effects of sintering the sensing pastes in air and vacuum have been reported. The air-fired sample exhibits the highest humidity sensitivity (1.54%/RH%) and the lowest temperature sensitivity (0.37%/oC). The vacuum-fired sample has the lowest humidity sensitivity (0.043%/RH) and the highest temperature sensitivity (0.77%/oC). The sensitivity results indicate that the air-fired sample has the best potential for use in humidity sensing applications. View Full-Text
Keywords: Ceramic; Thick film; Sensor; Temperature and humidity sensitivity Ceramic; Thick film; Sensor; Temperature and humidity sensitivity

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Arshaka, K.; Twomey, K.; Egan, D. A Ceramic Thick Film Humidity Sensor Based on MnZn Ferrite. Sensors 2002, 2, 50-61.

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