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        Journal: Sensors, 2019
        Volume: 19 
                	Number: 488 
                
        
        Article:
        Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor 
        Authors: 
       	by
                    Jaewoo Lee, Jong-Pil Im, Jeong-Hun Kim, Sol-Yee Lim and Seung-Eon Moon        
        Link:
        https://www.mdpi.com/1424-8220/19/3/488
        
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