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Journal: Sensors, 2019
Volume: 19
Number: 488
Article:
Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor
Authors:
by
Jaewoo Lee, Jong-Pil Im, Jeong-Hun Kim, Sol-Yee Lim and Seung-Eon Moon
Link:
https://www.mdpi.com/1424-8220/19/3/488
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