Order Article Reprints

Liu W, He L, Wang X, Zhou J, Xu W, Smagin N, Toubal M, Yu H, Gu Y, Xu J, et al. 3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI. Sensors. 2019; 19(20):4450. https://doi.org/10.3390/s19204450

Liu, Wenjuan, Leming He, Xubo Wang, Jia Zhou, Weijiang Xu, Nikolay Smagin, Malika Toubal, Hao Yu, Yuandong Gu, Jinghui Xu, and et al. 2019. "3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI" Sensors 19, no. 20: 4450. https://doi.org/10.3390/s19204450

Liu, W., He, L., Wang, X., Zhou, J., Xu, W., Smagin, N., Toubal, M., Yu, H., Gu, Y., Xu, J., Remiens, D., & Ren, J. (2019). 3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI. Sensors, 19(20), 4450. https://doi.org/10.3390/s19204450