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Journal: Sensors, 2018
Volume: 18
Number: 1797
Article:
Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review
Authors:
by
Abid Iqbal and Faisal Mohd-Yasin
Link:
https://www.mdpi.com/1424-8220/18/6/1797
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