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Sensors 2018, 18(2), 439; https://doi.org/10.3390/s18020439

Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy

E.T.S. Ingenieros Industriales, Polytechnical University of Madrid, C/José Gutiérrez Abascal, 2. 28006 Madrid, Spain
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Received: 9 January 2018 / Revised: 30 January 2018 / Accepted: 31 January 2018 / Published: 2 February 2018
(This article belongs to the Special Issue Sensors for MEMS and Microsystems)
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Abstract

This paper presents a novel structural piezoresistive pressure sensor with four-grooved membrane combined with rood beam to measure low pressure. In this investigation, the design, optimization, fabrication, and measurements of the sensor are involved. By analyzing the stress distribution and deflection of sensitive elements using finite element method, a novel structure featuring high concentrated stress profile (HCSP) and locally stiffened membrane (LSM) is built. Curve fittings of the mechanical stress and deflection based on FEM simulation results are performed to establish the relationship between mechanical performance and structure dimension. A combination of FEM and curve fitting method is carried out to determine the structural dimensions. The optimized sensor chip is fabricated on a SOI wafer by traditional MEMS bulk-micromachining and anodic bonding technology. When the applied pressure is 1 psi, the sensor achieves a sensitivity of 30.9 mV/V/psi, a pressure nonlinearity of 0.21% FSS and an accuracy of 0.30%, and thereby the contradiction between sensitivity and linearity is alleviated. In terms of size, accuracy and high temperature characteristic, the proposed sensor is a proper choice for measuring pressure of less than 1 psi. View Full-Text
Keywords: piezoresistive pressure sensor; high sensitivity; low pressure nonlinearity error; SOI structure; micro-pressure measurement piezoresistive pressure sensor; high sensitivity; low pressure nonlinearity error; SOI structure; micro-pressure measurement
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Li, C.; Cordovilla, F.; Jagdheesh, R.; Ocaña, J.L. Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy. Sensors 2018, 18, 439.

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