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Sensors 2018, 18(2), 358;

Photo-Induced Room-Temperature Gas Sensing with a-IGZO Based Thin-Film Transistors Fabricated on Flexible Plastic Foil

Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zürich, Gloriastrasse 35, 8092 Zürich, Switzerland
Laboratory for Gas Sensors, Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg, Germany
Fraunhofer Institute for Physical Measurement Techniques, Freiburg, Germany
Department of Computer Science, Universidad Autónoma de Madrid, Francisco Tomás y Valiente 11, 28049 Madrid, Spain
Author to whom correspondence should be addressed.
Received: 19 December 2017 / Revised: 19 January 2018 / Accepted: 23 January 2018 / Published: 26 January 2018
(This article belongs to the Special Issue Thin-Film Transistors for Biomedical and Chemical Sensing)
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We present a gas sensitive thin-film transistor (TFT) based on an amorphous Indium–Gallium–Zinc–Oxide (a-IGZO) semiconductor as the sensing layer, which is fabricated on a free-standing flexible polyimide foil. The photo-induced sensor response to NO2 gas at room temperature and the cross-sensitivity to humidity are investigated. We combine the advantages of a transistor based sensor with flexible electronics technology to demonstrate the first flexible a-IGZO based gas sensitive TFT. Since flexible plastic substrates prohibit the use of high operating temperatures, the charge generation is promoted with the help of UV-light absorption, which ultimately triggers the reversible chemical reaction with the trace gas. Furthermore, the device fabrication process flow can be directly implemented in standard TFT technology, allowing for the parallel integration of the sensor and analog or logical circuits. View Full-Text
Keywords: a-IGZO; gas sensor; flexible electronics; thin-film transistor; NO2 a-IGZO; gas sensor; flexible electronics; thin-film transistor; NO2

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Knobelspies, S.; Bierer, B.; Daus, A.; Takabayashi, A.; Salvatore, G.A.; Cantarella, G.; Ortiz Perez, A.; Wöllenstein, J.; Palzer, S.; Tröster, G. Photo-Induced Room-Temperature Gas Sensing with a-IGZO Based Thin-Film Transistors Fabricated on Flexible Plastic Foil. Sensors 2018, 18, 358.

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