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Sensors 2017, 17(7), 1548; https://doi.org/10.3390/s17071548

Low-Cost and Rapid Fabrication of Metallic Nanostructures for Sensitive Biosensors Using Hot-Embossing and Dielectric-Heating Nanoimprint Methods

1
Research Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan
2
Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan
3
Institute of Optoelectronic Sciences, National Taiwan Ocean University, Keelung 20224, Taiwan
*
Authors to whom correspondence should be addressed.
Received: 7 June 2017 / Revised: 26 June 2017 / Accepted: 29 June 2017 / Published: 2 July 2017
(This article belongs to the Special Issue Micro and Nanofabrication Technologies for Biosensors)
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Abstract

We propose two approaches—hot-embossing and dielectric-heating nanoimprinting methods—for low-cost and rapid fabrication of periodic nanostructures. Each nanofabrication process for the imprinted plastic nanostructures is completed within several seconds without the use of release agents and epoxy. Low-cost, large-area, and highly sensitive aluminum nanostructures on A4 size plastic films are fabricated by evaporating aluminum film on hot-embossing nanostructures. The narrowest bandwidth of the Fano resonance is only 2.7 nm in the visible light region. The periodic aluminum nanostructure achieves a figure of merit of 150, and an intensity sensitivity of 29,345%/RIU (refractive index unit). The rapid fabrication is also achieved by using radio-frequency (RF) sensitive plastic films and a commercial RF welding machine. The dielectric-heating, using RF power, takes advantage of the rapid heating/cooling process and lower electric power consumption. The fabricated capped aluminum nanoslit array has a 5 nm Fano linewidth and 490.46 nm/RIU wavelength sensitivity. The biosensing capabilities of the metallic nanostructures are further verified by measuring antigen–antibody interactions using bovine serum albumin (BSA) and anti-BSA. These rapid and high-throughput fabrication methods can benefit low-cost, highly sensitive biosensors and other sensing applications. View Full-Text
Keywords: metallic nanostructures; biosensors; Fano resonance; hot-embossing; radio-frequency heating; template-stripping metallic nanostructures; biosensors; Fano resonance; hot-embossing; radio-frequency heating; template-stripping
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Lee, K.-L.; Wu, T.-Y.; Hsu, H.-Y.; Yang, S.-Y.; Wei, P.-K. Low-Cost and Rapid Fabrication of Metallic Nanostructures for Sensitive Biosensors Using Hot-Embossing and Dielectric-Heating Nanoimprint Methods. Sensors 2017, 17, 1548.

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