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Journal: Sensors, 2015
Volume: 15
Number: 24257
Article:
A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging
Authors:
by
Bo Xie, Yonghao Xing, Yanshuang Wang, Jian Chen, Deyong Chen and Junbo Wang
Link:
https://www.mdpi.com/1424-8220/15/9/24257
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