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Journal: Sensors, 2015
Volume: 15
Number: 24257

Article: A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging
Authors: by Bo Xie, Yonghao Xing, Yanshuang Wang, Jian Chen, Deyong Chen and Junbo Wang
Link: https://www.mdpi.com/1424-8220/15/9/24257

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