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Sensors 2015, 15(10), 27047-27059;

Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique

Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui 251, Taiwan
Author to whom correspondence should be addressed.
Academic Editor: Michael Tiemann
Received: 26 September 2015 / Revised: 18 October 2015 / Accepted: 20 October 2015 / Published: 23 October 2015
(This article belongs to the Special Issue Gas Sensors—Designs and Applications)
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A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm. View Full-Text
Keywords: methanol sensor; tin dioxide; cadmium sulfide; heater methanol sensor; tin dioxide; cadmium sulfide; heater

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Fong, C.-F.; Dai, C.-L.; Wu, C.-C. Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique. Sensors 2015, 15, 27047-27059.

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