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Journal: Sensors, 2013
Volume: 13
Number: 1085
1085-1101
Article: Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module
Authors: by Zao Ni, Chen Yang, Dehui Xu, Hong Zhou, Wei Zhou, Tie Li, Bin Xiong and Xinxin Li
Link: https://www.mdpi.com/1424-8220/13/1/1085

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