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Journal: Sensors, 2011
Volume: 11
Number: 4972
Article:
Two-Scale Simulation of Drop-Induced Failure of Polysilicon MEMS Sensors
Authors:
by
Stefano Mariani, Aldo Ghisi, Alberto Corigliano, Roberto Martini and Barbara Simoni
Link:
https://www.mdpi.com/1424-8220/11/5/4972
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