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Journal: Sensors, 2010
Volume: 10
Number: 10524
Article:
Optimal and Robust Design Method for Two-Chip Out-of-Plane Microaccelerometers
Authors:
by
Sangmin Lee, Hyoungho Ko, Byoungdoo Choi and Dong-il Dan Cho
Link:
https://www.mdpi.com/1424-8220/10/12/10524
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