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Article

A Tunable Strain Sensor Using Nanogranular Metals

1
Physikalisches Institut, Goethe Universität, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany
2
Nanoscale Systems GmbH, Robert-Bosch-Str. 7, 64293 Darmstadt, Germany
3
RheinMain University of Applied Sciences, Am Brückweg 26, 65428 Rüsselsheim, Germany
*
Author to whom correspondence should be addressed.
Sensors 2010, 10(11), 9847-9856; https://doi.org/10.3390/s101109847
Received: 16 September 2010 / Revised: 12 October 2010 / Accepted: 13 October 2010 / Published: 2 November 2010
This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals. The strain-sensor elements are prepared by the maskless lithography technique of focused electron-beam-induced deposition (FEBID) employing the precursor trimethylmethylcyclopentadienyl platinum [MeCpPt(Me)3]. We use a cantilever-based deflection technique to determine the sensitivity (gauge factor) of the sensor element. We find that its sensitivity depends on the electrical conductivity and can be continuously tuned, either by the thickness of the deposit or by electron-beam irradiation leading to a distinct maximum in the sensitivity. This maximum finds a theoretical rationale in recent advances in the understanding of electronic charge transport in nano-granular metals. View Full-Text
Keywords: cantilevers; electron beam induced deposition; granular metals; strain sensors cantilevers; electron beam induced deposition; granular metals; strain sensors
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MDPI and ACS Style

Schwalb, C.H.; Grimm, C.; Baranowski, M.; Sachser, R.; Porrati, F.; Reith, H.; Das, P.; Müller, J.; Völklein, F.; Kaya, A.; Huth, M. A Tunable Strain Sensor Using Nanogranular Metals. Sensors 2010, 10, 9847-9856. https://doi.org/10.3390/s101109847

AMA Style

Schwalb CH, Grimm C, Baranowski M, Sachser R, Porrati F, Reith H, Das P, Müller J, Völklein F, Kaya A, Huth M. A Tunable Strain Sensor Using Nanogranular Metals. Sensors. 2010; 10(11):9847-9856. https://doi.org/10.3390/s101109847

Chicago/Turabian Style

Schwalb, Christian H., Christina Grimm, Markus Baranowski, Roland Sachser, Fabrizio Porrati, Heiko Reith, Pintu Das, Jens Müller, Friedemann Völklein, Alexander Kaya, and Michael Huth. 2010. "A Tunable Strain Sensor Using Nanogranular Metals" Sensors 10, no. 11: 9847-9856. https://doi.org/10.3390/s101109847

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