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Journal: Molecules, 2020
Volume: 25
Number: 5043
Article:
Air Annealing Effect on Oxygen Vacancy Defects in Al-doped ZnO Films Grown by High-Speed Atmospheric Atomic Layer Deposition
Authors:
by
Chia-Hsun Hsu, Xin-Peng Geng, Wan-Yu Wu, Ming-Jie Zhao, Xiao-Ying Zhang, Pao-Hsun Huang and Shui-Yang Lien
Link:
https://www.mdpi.com/1420-3049/25/21/5043
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