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Keywords = single-walled carbon nanonets

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12 pages, 969 KiB  
Article
Design and Fabrication of Single-Walled Carbon Nanonet Flexible Strain Sensors
by Ya-Ting Huang, Shyh-Chour Huang, Chih-Chao Hsu, Ru-Min Chao and Trung Kien Vu
Sensors 2012, 12(3), 3269-3280; https://doi.org/10.3390/s120303269 - 7 Mar 2012
Cited by 17 | Viewed by 8156
Abstract
This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as [...] Read more.
This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small. Full article
(This article belongs to the Section Physical Sensors)
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