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Keywords = roll-type polishing system

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25 pages, 13107 KiB  
Article
Vibration-Assisted Roll-Type Polishing System Based on Compliant Micro-Motion Stage
by Yan Gu, Xiuyuan Chen, Jieqiong Lin, Mingming Lu, Faxiang Lu, Zheming Zhang and Hao Yang
Micromachines 2018, 9(10), 499; https://doi.org/10.3390/mi9100499 - 29 Sep 2018
Cited by 21 | Viewed by 3752
Abstract
This paper aims to create a high-quality surface based on the linear contact material removal mechanism. For this paper, a piezo-driven, flexure-based micro-motion stage was developed for the vibration-assisted roll-type precision polishing system. Meanwhile, the compliance matrix method was employed to establish the [...] Read more.
This paper aims to create a high-quality surface based on the linear contact material removal mechanism. For this paper, a piezo-driven, flexure-based micro-motion stage was developed for the vibration-assisted roll-type precision polishing system. Meanwhile, the compliance matrix method was employed to establish the amplification ratio and compliance model of the flexure mechanism. The dimensions of the mechanism were optimized using the grey wolves optimization (GWO) algorithm, aiming to maximize the natural frequencies. Using the optimal parameters, the established models for the mechanical performance evaluation of the flexure stage were verified with the finite-element method. Through closed-loop test, it was proven that the proposed micro-motion stage performs well in positioning micro motions. Finally, high quality surface using silicon carbide (SiC) ceramic with 36 nm Sa was generated by the independently developed vibration-assisted roll-type polishing machine to validate the performance of the established polishing system. Full article
(This article belongs to the Section A:Physics)
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