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  • Article
  • Open Access
19 Citations
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13 Pages

Noise Improvement of a-Si Microbolometers by the Post-Metal Annealing Process

  • Jaesub Oh,
  • Hyeong-sub Song,
  • Jongcheol Park and
  • Jong-Kwon Lee

10 October 2021

To realize high-resolution thermal images with high quality, it is essential to improve the noise characteristics of the widely adopted uncooled microbolometers. In this work, we applied the post-metal annealing (PMA) process under the condition of d...

(This article belongs to the Section Physical Sensors)