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Keywords = Einzel lens

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10 pages, 7708 KiB  
Article
Commissioning Results of the New Compact ECR Ion Source for Electrostatic Storage Ring at KACST
by Suliman Alshammari, Abdullh Jabr, Saad Jaddua and Abdulhakim Alabadusalam
Instruments 2023, 7(1), 11; https://doi.org/10.3390/instruments7010011 - 23 Feb 2023
Cited by 1 | Viewed by 3113
Abstract
A compact microwave ECR ion source with low operating power was tested and commissioned for the ion injector line in the multipurpose low-energy ELASR storage ring facility at King Abdulaziz City for Science and Technology (KACST) in Riyadh. The compact ECR ion source [...] Read more.
A compact microwave ECR ion source with low operating power was tested and commissioned for the ion injector line in the multipurpose low-energy ELASR storage ring facility at King Abdulaziz City for Science and Technology (KACST) in Riyadh. The compact ECR ion source can deliver singly charged ions with an energy of up to 50 keV and a beam current of up to 50 μA or up to 500 µA with a larger extraction aperture. The plasma in the ECR chamber is driven by a simple transmitter antenna, making the overall size of the ion source only 6 cm in diameter, which is relatively small when compared with other ECR systems. Additionally, the source operates without a high-voltage platform, which significantly reduces the overall footprint and simplifies the system operation. In this paper, the mechanical design and modeling of the ECR ion source are introduced, and the layout of the first part of the beam line is presented along with the numerical simulation results. In addition, the experimental results obtained for the first generated ion beam and commissioning of the ECR ion source are introduced and discussed. Full article
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15 pages, 47166 KiB  
Article
Design of an Einzel Lens with Square Cross-Section
by Michał Krysztof
Electronics 2021, 10(19), 2338; https://doi.org/10.3390/electronics10192338 - 23 Sep 2021
Cited by 1 | Viewed by 3530
Abstract
In this paper, the results of modeling and simulation of a microcolumn are presented. The microcolumn is part of a developed miniature MEMS electron microscope equipped with a miniature MEMS high-vacuum micropump. Such an arrangement makes this device the first stand-alone miniature electron-optical [...] Read more.
In this paper, the results of modeling and simulation of a microcolumn are presented. The microcolumn is part of a developed miniature MEMS electron microscope equipped with a miniature MEMS high-vacuum micropump. Such an arrangement makes this device the first stand-alone miniature electron-optical device to operate without an external high-vacuum chamber. Before such a device can be fabricated, research on particular elements must be carried out to determine the working principles of the device. The results of the calculations described in this article help us to understand the work of a microcolumn with square holes in the electrodes. The formation of an electron beam spot at the anode is discussed. Further calculations and results show the dependence of the Einzel lens size on the electron beam spot diameter, electron beam current, and microcolumn focusing voltage. The results are used to define the optimal design of the developed MEMS electron microscope. Full article
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10 pages, 2701 KiB  
Article
Raman Scattering Study on the Influence of E-Beam Bombardment on Si Electron Lens
by Geon-Woo Lee, Young-Bok Lee, Dong-Hyun Baek, Jung-Gon Kim and Ho-Seob Kim
Molecules 2021, 26(9), 2766; https://doi.org/10.3390/molecules26092766 - 8 May 2021
Cited by 3 | Viewed by 3940
Abstract
Microcolumns have a stacked structure composed of an electron emitter, electron lens (source lens), einzel lens, and a deflector manufactured using a micro electro-mechanical system process. The electrons emitted from the tungsten field emitter mostly pass through the aperture holes. However, other electrons [...] Read more.
Microcolumns have a stacked structure composed of an electron emitter, electron lens (source lens), einzel lens, and a deflector manufactured using a micro electro-mechanical system process. The electrons emitted from the tungsten field emitter mostly pass through the aperture holes. However, other electrons fail to pass through because of collisions around the aperture hole. We used Raman scattering measurements and X-ray photoelectron spectroscopy analyses to investigate the influence of electron beam bombardment on a Si electron lens irradiated by acceleration voltages of 0, 20, and 30 keV. We confirmed that the crystallinity was degraded, and carbon-related contamination was detected at the surface and edge of the aperture hole of the Si electron lens after electron bombardment for 24 h. Carbon-related contamination on the surface of the Si electron lens was verified by analyzing the Raman spectra of the carbon-deposited Si substrate using DC sputtering and a carbon rod sample. We report the crystallinity and the origin of the carbon-related contamination of electron Si lenses after electron beam bombardment by non-destructive Raman scattering and XPS analysis methods. Full article
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