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Journal: Proceedings, 2024
Volume: 97
Number: 73
Article:
MEMS Valves with Molecular Flow Regime Orifices
Authors:
by
Alvise Bagolini, Raffaele Correale, Antonino Picciotto and Leandro Lorenzelli
Link:
https://www.mdpi.com/2504-3900/97/1/73
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