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Journal: Proceedings, 2024
Volume: 97
Number: 69
Article:
Morpho-Mechanical Characterization and Removal Strategy of Pile-Ups in AFM-Based Nanolithography
Authors:
by
Paolo Pellegrino, Isabella Farella, Lorenzo Vincenti, Mariafrancesca Cascione, Valeria De Matteis, Fabio Quaranta and Rosaria Rinaldi
Link:
https://www.mdpi.com/2504-3900/97/1/69
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