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Journal: Proceedings, 2024
Volume: 97
Number: 185
Article:
Flexural Plate Wave Piezoelectric MEMS Pressure Sensor
Authors:
by
Alessandro Nastro, Stefano Bertelli, Marco Ferrari, Libor Rufer, Skandar Basrour and Vittorio Ferrari
Link:
https://www.mdpi.com/2504-3900/97/1/185
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