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Journal: Proceedings, 2024
Volume: 97
Number: 176
Article:
Reliable Damping Simulation of Highly Perforated Micro-Electro-Mechanical Systems through Physical Compact Modeling
Authors:
by
Friederike Michael, Barbara Leikam and Gabriele Schrag
Link:
https://www.mdpi.com/2504-3900/97/1/176
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