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Extended Abstract

Looking Inside Micro- and Nano-Mechanical Pillar Resonators: A Picosecond Ultrasonics Approach †

1
Department of Physics, University of Konstanz, D-78457 Konstanz, Germany
2
Institute for Technical Physics, German Aerospace Center (DLR), D-70569 Stuttgart, Germany
3
LAUM, UMR-CNRS 6613, Le Mans Université, Avenue O. Messiaen, 72085 Le Mans, France
4
Research Center for Non-Destructive Testing (RECENDT), 4040 Linz, Austria
*
Authors to whom correspondence should be addressed.
Presented at the 4th International Conference nanoFIS 2020—Functional Integrated nano Systems, Graz, Austria, 2–4 November 2020.
Proceedings 2020, 56(1), 31; https://doi.org/10.3390/proceedings2020056031
Published: 28 December 2020
Pillar-shaped Gallium arsenide (GaAs) micromechanical resonators are fabricated, and the feasibility to measure the inside of the pillars in the axial direction with laser-induced GHz ultrasound based on picosecond ultrasonics is tested. Measurements on the pillars with head sizes in the µm range show excellent agreement with theoretical predictions. View Full-Text
Keywords: nanomechanics; elasticity; picosecond ultrasonics; nanoanalytics nanomechanics; elasticity; picosecond ultrasonics; nanoanalytics
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MDPI and ACS Style

Stritt, P.; Doster, J.; Dekorsy, T.; Gusev, V.; Weig, E.; Hettich, M. Looking Inside Micro- and Nano-Mechanical Pillar Resonators: A Picosecond Ultrasonics Approach. Proceedings 2020, 56, 31. https://doi.org/10.3390/proceedings2020056031

AMA Style

Stritt P, Doster J, Dekorsy T, Gusev V, Weig E, Hettich M. Looking Inside Micro- and Nano-Mechanical Pillar Resonators: A Picosecond Ultrasonics Approach. Proceedings. 2020; 56(1):31. https://doi.org/10.3390/proceedings2020056031

Chicago/Turabian Style

Stritt, Paul, Juliane Doster, Thomas Dekorsy, Vitalyi Gusev, Eva Weig, and Mike Hettich. 2020. "Looking Inside Micro- and Nano-Mechanical Pillar Resonators: A Picosecond Ultrasonics Approach" Proceedings 56, no. 1: 31. https://doi.org/10.3390/proceedings2020056031

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