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Processes
Volume 12
Issue 11
10.3390/pr12112321
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Journal: Processes, 2024
Volume: 12
Number: 2321

Article: Study on the Destruction and Removal Efficiency (DRE) of Perfluorinated Compound Gases Used in Semiconductor and Display Processes in Korea: DRE and Uncertainty by Scrubber Type
Authors: by Seongmin Kang, Jiyun Woo, Goeun Kim, Daekee Min, Joohee Lee and Eui-chan Jeon
Link: https://www.mdpi.com/2227-9717/12/11/2321

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