The Effect of Trimethylaluminum Flow Rate on the Structure and Optical Properties of AlInGaN Quaternary Epilayers
Abstract
:1. Introduction
2. Results
3. Materials and Methods
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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ID | Flow Rate (μmol/min) | Growth Rate (nm/min) | V/III | Pressure (Torr) | Growth Temperature | TMA/III | ||
---|---|---|---|---|---|---|---|---|
TEGa | TMA | TMIn | ||||||
1 | 14.1 | 1.15 | 3.98 | 3.2 | 8000 | 100 | 850° | 0.013 |
2 | 14.1 | 1.56 | 3.98 | 3.2 | 8000 | 100 | 850° | 0.020 |
3 | 14.1 | 1.90 | 3.98 | 3.2 | 8000 | 100 | 850° | 0.022 |
4 | 14.1 | 0 | 3.98 | 3.2 | 8000 | 100 | 850° |
ID | c-Axis Lattice Parameter (nm) | Composition (%) | Lattice Mismatch with GaN | XPS Results (%) | (0004) FWHM (arcsec) | V-Defect Density (cm−2) | |||||
---|---|---|---|---|---|---|---|---|---|---|---|
Al | In | Ga | In | Ga | N | Al | AlInGaN | ||||
1 | 0.5185 | 15.0 | 4.2 | 80.8 | Match | 1.14 | 39.34 | 59.52 | 0.00 | 195 | 2.2 × 107 |
2 | 0.5163 | 17.5 | 4.0 | 78.5 | −0.414% | 1.82 | 34.58 | 57.14 | 6.45 | 220 | 2.8 × 107 |
3 | 0.5156 | 21.6 | 3.4 | 75.0 | −0.559% | 1.79 | 33.69 | 55.99 | 5.73 | 242 | 3.4 × 107 |
4 | 0.5200 | 0.0 | 2.8 | 97.2 | 0.200% | 1.50 | 33.04 | 55.97 | 9.49 | 252 | 5.2 × 107 |
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Wang, D.; Liu, G.; Jiao, S.; Kong, L.; Liu, T.; Liu, T.; Wang, J.; Guo, F.; Luan, C.; Li, Z. The Effect of Trimethylaluminum Flow Rate on the Structure and Optical Properties of AlInGaN Quaternary Epilayers. Crystals 2017, 7, 69. https://doi.org/10.3390/cryst7030069
Wang D, Liu G, Jiao S, Kong L, Liu T, Liu T, Wang J, Guo F, Luan C, Li Z. The Effect of Trimethylaluminum Flow Rate on the Structure and Optical Properties of AlInGaN Quaternary Epilayers. Crystals. 2017; 7(3):69. https://doi.org/10.3390/cryst7030069
Chicago/Turabian StyleWang, Dongbo, Gang Liu, Shujie Jiao, Lingping Kong, Teren Liu, Tong Liu, Jinzhong Wang, Fengyun Guo, Chunyang Luan, and Zhenghao Li. 2017. "The Effect of Trimethylaluminum Flow Rate on the Structure and Optical Properties of AlInGaN Quaternary Epilayers" Crystals 7, no. 3: 69. https://doi.org/10.3390/cryst7030069
APA StyleWang, D., Liu, G., Jiao, S., Kong, L., Liu, T., Liu, T., Wang, J., Guo, F., Luan, C., & Li, Z. (2017). The Effect of Trimethylaluminum Flow Rate on the Structure and Optical Properties of AlInGaN Quaternary Epilayers. Crystals, 7(3), 69. https://doi.org/10.3390/cryst7030069