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Journal: Crystals, 2020
Volume: 10
Number: 131

Article: Depth Profiling of Ion-Implanted 4H–SiC Using Confocal Raman Spectroscopy
Authors: by Ying Song, Zongwei Xu, Tao Liu, Mathias Rommel, Hong Wang, Yufang Wang and Fengzhou Fang
Link: https://www.mdpi.com/2073-4352/10/2/131

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