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Micromachines 2015, 6(5), 544-553; doi:10.3390/mi6050544

Transferable Integrated Optical SU8 Devices: From Micronic Waveguides to 1D-Nanostructures

1
Institut de Physique de Rennes, Université de Rennes 1, CNRS UMR 6251, 35042 Rennes Cedex, France
2
Institut des Matériaux de Nantes Jean Rouxel, Université de Nantes, CNRS UMR 6502, 44322 Nantes, France
3
ScanMAT–CMEBA, University of Rennes 1, Campus de Beaulieu, 35042 Rennes Cedex, France
*
Author to whom correspondence should be addressed.
Academic Editor: Arnaud Bertsch
Received: 26 March 2015 / Revised: 20 April 2015 / Accepted: 21 April 2015 / Published: 23 April 2015
(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
View Full-Text   |   Download PDF [4319 KB, uploaded 23 April 2015]   |  

Abstract

We report on optical components for integrated optics applications at the micro- and nanoscale. Versatile shapes and dimensions are achievable due to the liquid phase processability of SU8 resist. On the one hand, by adjusting the UV-lithography process, waveguiding structures are patterned and released from their original substrate. They can be replaced on any other substrate and also immerged in liquid wherein they still show off efficient light confinement. On the other hand, filled and hollow 1D-nanostructures are achievable by the wetting template method. By exploiting the large range of available SU8 viscosities, nanowires of diameter ranging between 50 nm and 240 nm, as well as nanotubes of controllable wall thickness are presented. Optical injection, propagation, and coupling in such nanostructures are relevant for highly integrated devices. View Full-Text
Keywords: integrated photonics; 1D-nanostructures; optical coupling; transferable waveguide; UV-lithography; wetting template method integrated photonics; 1D-nanostructures; optical coupling; transferable waveguide; UV-lithography; wetting template method
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Huby, N.; Bigeon, J.; Danion, G.; Duvail, J.-L.; Gouttefangeas, F.; Joanny, L.; Bêche, B. Transferable Integrated Optical SU8 Devices: From Micronic Waveguides to 1D-Nanostructures. Micromachines 2015, 6, 544-553.

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