Special Issue: 15 Years of SU8 as MEMS Material
Microsystems Laboratory (LMIS4), École Polytechnique Fédérale de Lausanne (EPFL), Station 17, 1015 Lausanne, Switzerland
Author to whom correspondence should be addressed.
Received: 15 June 2015 / Revised: 19 June 2015 / Accepted: 19 June 2015 / Published: 19 June 2015
Note: In lieu of an abstract, this is an excerpt from the first page.
In 1997, the first paper using SU-8 as a material for microfabrication was published , demonstrating the interest of this negative photoresist for the near-UV structuration of thick layers and the manufacturing of high aspect-ratio components.[...]
This is an open access article distributed under the Creative Commons Attribution License
which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
Share & Cite This Article
MDPI and ACS Style
Bertsch, A.; Renaud, P. Special Issue: 15 Years of SU8 as MEMS Material. Micromachines 2015, 6, 790-792.
Bertsch A, Renaud P. Special Issue: 15 Years of SU8 as MEMS Material. Micromachines. 2015; 6(6):790-792.
Bertsch, Arnaud; Renaud, Philippe. 2015. "Special Issue: 15 Years of SU8 as MEMS Material." Micromachines 6, no. 6: 790-792.
Show more citation formats
Show less citations formats
[Return to top]
For more information on the journal statistics, click here
Multiple requests from the same IP address are counted as one view.