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Keywords = suspended directional coupler

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13 pages, 2047 KiB  
Article
Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer
by Yu Feng, Wuhao Yang and Xudong Zou
Micromachines 2023, 14(1), 39; https://doi.org/10.3390/mi14010039 - 23 Dec 2022
Cited by 3 | Viewed by 2469
Abstract
In this paper, we demonstrate a novel photonic integrated accelerometer based on the optical mode localization sensing mechanism, which is designed on an SOI wafer with a device layer thickness of 220 nm. High sensitivity and large measurement range can be achieved by [...] Read more.
In this paper, we demonstrate a novel photonic integrated accelerometer based on the optical mode localization sensing mechanism, which is designed on an SOI wafer with a device layer thickness of 220 nm. High sensitivity and large measurement range can be achieved by integrating coupled ring resonators with a suspended directional coupler on a proof mass. With the help of FEA simulation and numerical analysis, the proposed optical mode-localized sensor presents a sensitivity of 10/g (modal power ratio/acceleration) and an inertial displacement of from −8 to 10 microns corresponding to a range from −23.5 to 29.4 g. The free spectral range is 4.05 nm around 1.55 microns. The acceleration resolution limited by thermomechanical noise is 4.874 μg. The comprehensive performance of this design is competitive with existing MEMS mode localized accelerometers. It demonstrates the potential of the optical mode-localized inertial sensors as candidates for state-of-the-art sensors in the future. Full article
(This article belongs to the Special Issue MEMS Accelerometers: Design, Applications and Characterization)
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12 pages, 2236 KiB  
Article
Nanomechanical Optical Fiber with Embedded Electrodes Actuated by Joule Heating
by Zhenggang Lian, Martha Segura, Nina Podoliak, Xian Feng, Nicholas White and Peter Horak
Materials 2014, 7(8), 5591-5602; https://doi.org/10.3390/ma7085591 - 31 Jul 2014
Cited by 8 | Viewed by 6226
Abstract
Nanomechanical optical fibers with metal electrodes embedded in the jacket were fabricated by a multi-material co-draw technique. At the center of the fibers, two glass cores suspended by thin membranes and surrounded by air form a directional coupler that is highly temperature-dependent. We [...] Read more.
Nanomechanical optical fibers with metal electrodes embedded in the jacket were fabricated by a multi-material co-draw technique. At the center of the fibers, two glass cores suspended by thin membranes and surrounded by air form a directional coupler that is highly temperature-dependent. We demonstrate optical switching between the two fiber cores by Joule heating of the electrodes with as little as 0.4 W electrical power, thereby demonstrating an electrically actuated all-fiber microelectromechanical system (MEMS). Simulations show that the main mechanism for optical switching is the transverse thermal expansion of the fiber structure. Full article
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