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Keywords = self-heating hollow cathode

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11 pages, 7372 KiB  
Article
Synthesis Conditions and Properties of SiAlCN Coatings Obtained by Reactive Evaporation of Al in a Hollow Cathode Arc Discharge in Hexamethyldisilazane Vapors
by Andrey Menshakov, Yulia Bryuhanova, Ivan Zhidkov, Daniil Emlin and Polina Skorynina
Ceramics 2025, 8(2), 42; https://doi.org/10.3390/ceramics8020042 - 22 Apr 2025
Viewed by 464
Abstract
SiAlCN coatings were first obtained by the method of reactive evaporation of aluminum and plasma chemical activation of an organosilicon precursor in a hollow cathode arc discharge. The spectrum of discharge plasma was studied by optical emission spectroscopy under conditions of evaporation of [...] Read more.
SiAlCN coatings were first obtained by the method of reactive evaporation of aluminum and plasma chemical activation of an organosilicon precursor in a hollow cathode arc discharge. The spectrum of discharge plasma was studied by optical emission spectroscopy under conditions of evaporation of Al in an Ar+N2+hexamethyldisilazane vapor/gas medium, and it was shown that in the presence of a metal component in the plasma, not only did intensive activation of various components of the media occur but also an increased ionic effect on the surface of the coating was provided, with a deposition rate of up to 10.1 µm/h. The films had a dense and homogeneous structure and had a hardness of up to 31 GPa and good adhesion on stainless steel. The results of SEM, FTIR, and XRD showed that their structure was a nanocomposite consisting of an amorphous matrix based on SiCN and AlN with inclusions of AlCN nanocrystals. Full article
(This article belongs to the Special Issue Research Progress in Ceramic Coatings)
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11 pages, 1805 KiB  
Article
Effect of the Degree of Li3PO4 Vapor Dissociation on the Ionic Conductivity of LiPON Thin Films
by Alexander Kamenetskikh, Nikolay Gavrilov, Alexey Ershov and Petr Tretnikov
Membranes 2023, 13(10), 847; https://doi.org/10.3390/membranes13100847 - 23 Oct 2023
Viewed by 2433
Abstract
Thin films of solid-state lithium-ion electrolytes show promise for use in small-sized autonomous power sources for micro- and nanoelectronic elements. The high rate of vacuum-plasma synthesis (~0.5 μm/h) of lithium phosphor-oxynitride (LiPON) films with an ionic conductivity of ~2·10−6 S/cm is achieved [...] Read more.
Thin films of solid-state lithium-ion electrolytes show promise for use in small-sized autonomous power sources for micro- and nanoelectronic elements. The high rate of vacuum-plasma synthesis (~0.5 μm/h) of lithium phosphor-oxynitride (LiPON) films with an ionic conductivity of ~2·10−6 S/cm is achieved through anodic evaporation of Li3PO4 in a low-pressure arc. The microstructure and ionic conductivity of LiPON films are influenced by the proportion of free lithium in the vapor flow. This paper presents the results of a study on the plasma composition during anodic evaporation of Li3PO4 in a discharge with a self-heating hollow cathode and a crucible anode. A method is proposed for adjusting the free lithium concentration in the gas-vapor (Li3PO4 + N2/Ar) discharge plasma based on changing the frequency of collisions of electrons with Li3PO4 vapor in the anodic region of the discharge. It is demonstrated that an increase in the proportion of free lithium in the flow of deposited particles leads to an enhancement in the concentration and mobility of lithium ions in the deposited films and, subsequently, an improvement in the ionic conductivity of LiPON films. Full article
(This article belongs to the Special Issue Ion-Exchange Membranes and Processes, Fourth Edition)
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13 pages, 3404 KiB  
Article
Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge
by Andrey I. Menshakov, Yulia A. Bruhanova, Andrey I. Kukharenko and Ivan S. Zhidkov
Membranes 2022, 12(3), 321; https://doi.org/10.3390/membranes12030321 - 12 Mar 2022
Cited by 5 | Viewed by 3162
Abstract
TiSiCN coatings have been obtained by anode evaporation of titanium and the decomposition of hexamethyldisilazane in an arc discharge, using a self-heated hollow cathode, at the pressure rate of 1 mTorr of the Ar+N2 gas mixture. The proposed method makes it possible [...] Read more.
TiSiCN coatings have been obtained by anode evaporation of titanium and the decomposition of hexamethyldisilazane in an arc discharge, using a self-heated hollow cathode, at the pressure rate of 1 mTorr of the Ar+N2 gas mixture. The proposed method makes it possible to independently and widely change the amount of metal and precursor vapor flows, the pressure and composition of the vapor-gas mixture and the degree of ionic interaction on the surface of the growing coating within a single discharge system. The paper presents the method and the results of the effect of a current discharge (10–50 A), and the flux of precursor vapours (0–1 g/h), on deposition rates, compositions, and properties of TiSiCN coatings deposited by an advanced combined PVD+PECVD method. Dense homogeneous TiSiCN coatings up to 6 µm thick and up to 27.5 GPa in hardness were obtained at 7.5 µm/h. The composition of the obtained coatings has been studied by X-ray diffraction and X-ray photoelectron spectroscopy, and it has been shown that the presented methods can form nanocomposite coatings with nanocrystallites TiC, TiN, and TiCxN1−x 3–10 nm in the amorphous matrix based on SiCN. Full article
(This article belongs to the Special Issue Fabrication, Characterization and Application of Organic/Inorganic Film Membranes and Advanced Materials)
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12 pages, 4543 KiB  
Article
Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge
by Nikolay Gavrilov, Alexander Kamenetskikh, Petr Tretnikov, Alexey Nikonov, Leonid Sinelnikov, Denis Butakov, Viktor Nikolkin and Andrey Chukin
Membranes 2022, 12(1), 40; https://doi.org/10.3390/membranes12010040 - 28 Dec 2021
Cited by 6 | Viewed by 2951
Abstract
Thin amorphous films of LiPON solid electrolyte were prepared by anodic evaporation of lithium orthophosphate Li3PO4 in an arc discharge with a self-heating hollow cathode at a nitrogen pressure of 1 Pa. Distribution of the arc current between two electrodes [...] Read more.
Thin amorphous films of LiPON solid electrolyte were prepared by anodic evaporation of lithium orthophosphate Li3PO4 in an arc discharge with a self-heating hollow cathode at a nitrogen pressure of 1 Pa. Distribution of the arc current between two electrodes having an anode potential provided independent control of the evaporation rate of Li3PO4 and the density of nitrogen plasma. Stabilization of the evaporation rate was achieved using a crucible with multi-aperture cover having floating potential. The existence of a threshold value of discharge current (40 A) has been established, which, upon reaching ionic conductivity over 10−8 S/cm, appears in the films. Probe diagnostics of discharge plasma were carried out. It has been shown that heating the films during deposition by plasma radiation to a temperature of 200 °C is not an impediment to achieving high ionic conductivity of the films. Dense uniform films of LiPON thickness 1 μm with ionic conductivity up to 1 × 10−6 S/cm at a deposition rate of 4 nm/min are obtained. Full article
(This article belongs to the Special Issue Fabrication, Characterization and Application of Organic/Inorganic Film Membranes and Advanced Materials)
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