Search Results (3)

Etching has become a critical step in semiconductor wafer fabrication, and its importance in semiconductor manufacturing highlights the fact that it directly determines the ability of the fab to produce high-process products, as well as the application performance of the chip. While the health of the etcher is a concern, especially for the cooling system, accurately predicting the remaining useful life (RUL) of the etcher cooling system is a critical task. Predictive maintenance (PDM) can be used to monitor the basic condition of the equipment by learning from historical data, and it can help solve the task of RUL prediction. In this paper, we propose the FECAM-WTCN-Informer model, which first obtains a new WTCN structure by inserting wavelet convolution into the TCN, and then combines the discrete cosine transform (DCT) and channel attention mechanism into the temporal neural network (TCN). Multidimensional feature extraction of time series data can be realized, and the processed features are input into the Informer network for prediction. Experimental results show that the method is significantly more accurate in terms of overall prediction performance (MSE, RMSE, and MAE), compared with other state-of-the-art methods, and is suitable for solving the problem of predictive maintenance of etching machine cooling systems. Full article

We sought to evaluate the effects of Er:YAG laser (LightTouch, LightInstruments, Israel) conditioning on enamel roughness and shear bond strength of orthodontic brackets on enamel. Eighteen human molars (n = 9) and premolars (n = 9), were divided into 3 groups depending on the enamel conditioning method; Er:YAG laser (G1, n = 6), conventional etching with 37% orthophosphoric acid (G2, n = 6), Er:YAG laser combined with conventional etching (G3, n = 6). Er:YAG laser parameters were as follows: energy: 100 mJ, frequency: 10 Hz, exposure time: 10 s, applicator diameter: 600 μm, fluence: 35.37 J/cm², distance: 1 mm away from a tooth, cooling: 80%. An MTS 858 MiniBionix^® machine was used to determine the shear bond strength (MTS System, Eden Prairie, MN, USA). The enamel structure was assessed using X-ray microtomography (SkyScan 1172, Bruker, Kontich, Belgium). The highest values of shear bond strength were obtained in the G3 group (9.23 ± 2.38 MPa) and the lowest values in the G2 group (6.44 ± 2.11 MPa) (p < 0.05). A significant change in the enamel surface was noted after applying laser, reaching up to 9% of enamel thickness, which was not observed in the etched samples. Moreover, the Er:YAG laser-irradiated enamel surface was characterized by the greatest roughness. The combined use of an Er:YAG laser with a conventional etching improves the adhesion of composite materials to the tooth. Full article

This paper studies the compound effect of liquid medium and laser on the workpiece and analyses the law of material surface temperature change during the processing. Taking 7075-T6 aluminum alloy as the research object, the surface temperature field of aluminum alloy processed using water-jet-assisted laser machining under different process parameters was simulated using finite element software. In addition, the temperature field of the material surface was detected in real-time using the self-built water-jet-assisted laser machining temperature field detection system, and the processing results were observed and verified using an optical microscope, scanning electron microscope, and energy spectrum analyzer. The results show that when the water jet inflow angle is 45°, the heat-affected area of the material surface is the smallest, and the cooling effect of the temperature field of the material surface is better. Considering the liquidus melting point of 7075 aluminum alloys, it is concluded that the processing effect is better when the water jet velocity is 14 m·s⁻¹, the laser power is 100 W, and the laser scanning speed is 1.2 mm·s⁻¹. At this time, the quality of the tank is relatively good, there are no cracks in the bottom of the tank, and there is less slag accumulation. Compared with anhydrous laser etching, water-jet-assisted laser etching can reduce the problems of micro-cracks, molten slag, and the formation of a recast layer in laser etching and improve the quality of the workpiece, and the composition of the bottom slag does not change. This study provides theoretical guidance and application support for the selection and optimization of process parameters for water-jet-assisted laser etching of aluminum alloy and further enriches the heat transfer mechanism of multi-field coupling in the process of water-jet-assisted laser machining. Full article