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Keywords = electrostatic bending-plate actuator

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14 pages, 11349 KiB  
Article
Large Stepwise Discrete Microsystem Displacements Based on Electrostatic Bending Plate Actuation
by Lisa Schmitt and Martin Hoffmann
Actuators 2021, 10(10), 272; https://doi.org/10.3390/act10100272 - 15 Oct 2021
Cited by 6 | Viewed by 2862
Abstract
We present the design, fabrication, and experimental characterization of microsystems achieving large and stepwise discrete displacements. The systems consist of electrostatic bending plate actuators linked in a chain with increasing electrode gaps to allow a stepwise system displacement. A derived analytic transfer function [...] Read more.
We present the design, fabrication, and experimental characterization of microsystems achieving large and stepwise discrete displacements. The systems consist of electrostatic bending plate actuators linked in a chain with increasing electrode gaps to allow a stepwise system displacement. A derived analytic transfer function permits to evaluate the influence of the system components on both the total and the stepwise system displacement. Based on calculation and simulation results, systems featuring 5, 8, 10, 13, and 16 steps are modeled and fabricated using a dicing-free SOI-fabrication process. During experimental voltage- and time-dependent system characterization, the minimum switching speed of the electrostatic actuators is 1 ms. Based on the guiding spring stiffness and the switching time, step-by-step and collective activations of the microsystems are performed and the system properties are derived. Furthermore, we analyze the influence of the number of steps on the total system displacement and present 16-step systems with a total maximum displacement of 230.7 ± 0.9 µm at 54 V. Full article
(This article belongs to the Special Issue Cooperative Microactuator Systems)
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15 pages, 12088 KiB  
Article
3-Bit Digital-to-Analog Converter with Mechanical Amplifier for Binary Encoded Large Displacements
by Lisa Schmitt, Philip Schmitt and Martin Hoffmann
Actuators 2021, 10(8), 182; https://doi.org/10.3390/act10080182 - 4 Aug 2021
Cited by 13 | Viewed by 3967
Abstract
We present the design, fabrication, and characterization of a MEMS-based 3-bit Digital-to-Analog Converter (DAC) that allows the generation of large displacements. The DAC consists of electrostatic bending-plate actuators that are connected to a mechanical amplifier (mechAMP), enabling the amplification of the DAC output [...] Read more.
We present the design, fabrication, and characterization of a MEMS-based 3-bit Digital-to-Analog Converter (DAC) that allows the generation of large displacements. The DAC consists of electrostatic bending-plate actuators that are connected to a mechanical amplifier (mechAMP), enabling the amplification of the DAC output displacement. Based on a parallel binary-encoded voltage signal, the output displacement of the system can be controlled in an arbitrary order. Considering the system design, we present a simplified analytic model, which was confirmed by FE simulation results. The fabricated systems showed a total stroke of approx. 149.5 ± 0.3 µm and a linear stepwise displacement of 3 bit correlated to 23 ≙ eight defined positions at a control voltage of 60 V. The minimum switching time between two input binary states is 0.1 ms. We present the experimental characterization of the system and the DAC and derive the influence of the mechAMP on the functionality of the DAC. Furthermore, the resonant behavior and the switching speed of the system are analyzed. By changing the electrode activation sequence, 27 defined positions are achieved upgrading the 3-bit systems into a 3-tri-state (33) system. Full article
(This article belongs to the Special Issue Cooperative Microactuator Systems)
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