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Keywords = crystal-ion-slicing (CIS)

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15 pages, 5847 KiB  
Article
LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling
by Shitian Huang, Yao Shuai, Lu Lv, Zijie Wei, Wei Fan, Yuedong Wang, Dailei Zhu, Xinqiang Pan, Wenbo Luo, Chuangui Wu and Wanli Zhang
Electronics 2023, 12(13), 2964; https://doi.org/10.3390/electronics12132964 - 5 Jul 2023
Cited by 10 | Viewed by 3419
Abstract
This paper reports an LNO surface acoustic wave (SAW) resonator based on a shear horizontal mode with high operating frequency over 3 GHz, large electromechanical coupling of 33.54%, Q factor of 380, and a relatively good figure of merit (FOM) of 127. Combing [...] Read more.
This paper reports an LNO surface acoustic wave (SAW) resonator based on a shear horizontal mode with high operating frequency over 3 GHz, large electromechanical coupling of 33.54%, Q factor of 380, and a relatively good figure of merit (FOM) of 127. Combing crystal-ion-slicing (CIS) technology with a room temperature bonding method, a 4-inch single crystalline LNO thin film on silicon is prepared successfully. The influence of damaged LNO film on crystalline quality and SAW performance is comprehensively analyzed. After totally removing the damaged layer, the electromechanical coupling and Q factor is significantly improved. The high-performance SAW resonator possesses the potential to meet the requirements of SAW filters for the fifth-generation (5G) communication in terms of high frequency, large bandwidth, and a high-quality factor. Full article
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