To search for new suitable Pd precursors for MOCVD/ALD processes, the extended series of fluorinated palladium complexes [Pd(CH
3CXCHCO(R))
2] with β-diketone [tfa−1,1,1-trifluoro-2,4-pentanedionato (
1); pfpa−5,5,6,6,6-pentafluoro-2,4-hexanedionato (
3); hfba−5,5,6,6,7,7,7-heptafluoro-2,4-heptanedionato (
5)] and β-iminoketone [i-tfa−1,1,1-trifluoro-2-imino-4-pentanonato (
2); i-pfpa−5,5,6,6,6-pentafluoro-2-imino-4-hexanonato
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To search for new suitable Pd precursors for MOCVD/ALD processes, the extended series of fluorinated palladium complexes [Pd(CH
3CXCHCO(R))
2] with β-diketone [tfa−1,1,1-trifluoro-2,4-pentanedionato (
1); pfpa−5,5,6,6,6-pentafluoro-2,4-hexanedionato (
3); hfba−5,5,6,6,7,7,7-heptafluoro-2,4-heptanedionato (
5)] and β-iminoketone [i-tfa−1,1,1-trifluoro-2-imino-4-pentanonato (
2); i-pfpa−5,5,6,6,6-pentafluoro-2-imino-4-hexanonato (
4); i-hfba-5,5,6,6,7,7,7-heptafluoro-2-imino-4-heptanonato (
6)] ligands were synthesized with 70–80% yields and characterized by a set of experimental (SXRD, XRD, IR, NMR spectroscopy, TG) and theoretical (DFT, Hirshfeld surface analysis) methods. Solutions of Pd β-diketonates contained both
cis and
trans isomers, while only
trans isomers were detected in the solutions of Pd β-iminoketonates. The molecules
2–
6 and new polymorphs of complexes
3 and
5 were arranged preferentially in stacks, and the distance between molecules in the stack generally increased with elongation of the fluorine chain in ligands. The H…F contacts were the main ones involved in the formation of packages of molecules
1–
2, and C…F, F…F, NH…F contacts appeared in the structures of complexes
4–
6. The stability of complexes and their polymorphs in the crystal phases were estimated from DFT calculations. The TG data showed that the volatility differences between Pd β-iminoketonates and Pd β-diketonates were minimized with the elongation of the fluorine chain in the ligands.
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