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Authors = Simas Šakirzanovas ORCID = 0000-0002-9941-6940

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10 pages, 4199 KiB  
Article
Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant
by Agnė Butkutė, Greta Merkininkaitė, Tomas Jurkšas, Jokūbas Stančikas, Tomas Baravykas, Rokas Vargalis, Titas Tičkūnas, Julien Bachmann, Simas Šakirzanovas, Valdas Sirutkaitis and Linas Jonušauskas
Materials 2022, 15(8), 2817; https://doi.org/10.3390/ma15082817 - 12 Apr 2022
Cited by 15 | Viewed by 3821
Abstract
Selective laser etching (SLE) is a technique that allows the fabrication of arbitrarily shaped glass micro-objects. In this work, we show how the capabilities of this technology can be improved in terms of selectivity and etch rate by applying an etchant solution based [...] Read more.
Selective laser etching (SLE) is a technique that allows the fabrication of arbitrarily shaped glass micro-objects. In this work, we show how the capabilities of this technology can be improved in terms of selectivity and etch rate by applying an etchant solution based on a Potassium Hydroxide, water, and isopropanol mixture. By varying the concentrations of these constituents, the wetting properties, as well as the chemical reaction of fused silica etching, can be changed, allowing us to achieve etching rates in modified fused silica up to 820 μm/h and selectivity up to ∼3000. This is used to produce a high aspect ratio (up to 1:1000), straight and spiral microfluidic channels which are embedded inside a volume of glass. Complex 3D glass micro-structures are also demonstrated. Full article
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12 pages, 17615 KiB  
Article
Laser 3D Printing of Inorganic Free-Form Micro-Optics
by Diana Gonzalez-Hernandez, Simonas Varapnickas, Greta Merkininkaitė, Arūnas Čiburys, Darius Gailevičius, Simas Šakirzanovas, Saulius Juodkazis and Mangirdas Malinauskas
Photonics 2021, 8(12), 577; https://doi.org/10.3390/photonics8120577 - 14 Dec 2021
Cited by 57 | Viewed by 6868
Abstract
A pilot study on laser 3D printing of inorganic free-form micro-optics is experimentally validated. Ultrafast laser direct-write (LDW) nanolithography is employed for structuring hybrid organic-inorganic material SZ2080TM followed by high-temperature calcination post-processing. The combination allows the production of 3D architectures and the [...] Read more.
A pilot study on laser 3D printing of inorganic free-form micro-optics is experimentally validated. Ultrafast laser direct-write (LDW) nanolithography is employed for structuring hybrid organic-inorganic material SZ2080TM followed by high-temperature calcination post-processing. The combination allows the production of 3D architectures and the heat-treatment results in converting the material to inorganic substances. The produced miniature optical elements are characterized and their optical performance is demonstrated. Finally, the concept is validated for manufacturing compound optical components such as stacked lenses. This is an opening for new directions and applications of laser-made micro-optics under harsh conditions such as high intensity radiation, temperature, acidic environment, pressure variations, which include open space, astrophotonics, and remote sensing. Full article
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18 pages, 10651 KiB  
Article
Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser Lithography
by Linas Jonušauskas, Darius Gailevičius, Lina Mikoliūnaitė, Danas Sakalauskas, Simas Šakirzanovas, Saulius Juodkazis and Mangirdas Malinauskas
Materials 2017, 10(1), 12; https://doi.org/10.3390/ma10010012 - 2 Jan 2017
Cited by 124 | Viewed by 16971
Abstract
We introduce optically clear and resilient free-form micro-optical components of pure (non-photosensitized) organic-inorganic SZ2080 material made by femtosecond 3D laser lithography (3DLL). This is advantageous for rapid printing of 3D micro-/nano-optics, including their integration directly onto optical fibers. A systematic study of the [...] Read more.
We introduce optically clear and resilient free-form micro-optical components of pure (non-photosensitized) organic-inorganic SZ2080 material made by femtosecond 3D laser lithography (3DLL). This is advantageous for rapid printing of 3D micro-/nano-optics, including their integration directly onto optical fibers. A systematic study of the fabrication peculiarities and quality of resultant structures is performed. Comparison of microlens resiliency to continuous wave (CW) and femtosecond pulsed exposure is determined. Experimental results prove that pure SZ2080 is ∼20 fold more resistant to high irradiance as compared with standard lithographic material (SU8) and can sustain up to 1.91 GW/cm2 intensity. 3DLL is a promising manufacturing approach for high-intensity micro-optics for emerging fields in astro-photonics and atto-second pulse generation. Additionally, pyrolysis is employed to homogeneously shrink structures up to 40% by removing organic SZ2080 constituents. This opens a promising route towards downscaling photonic lattices and the creation of mechanically robust glass-ceramic microstructures. Full article
(This article belongs to the Special Issue Ultrafast Laser-Based Manufacturing)
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