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Authors = Anette Simonis

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10 pages, 719 KiB  
Article
Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor
by Anette Simonis, Hans Lüth, Joseph Wang and J. Schöning
Sensors 2003, 3(9), 330-339; https://doi.org/10.3390/s30900330 - 11 Sep 2003
Cited by 16 | Viewed by 10005
Abstract
Different types of Ag/AgCl reference electrodes have been realised by means of thin- and thick-film technique. For inner electrolyte, KCl-containing membranes have been deposited and different coatings have been used to protect the reference electrode from a fast leaching out of KCl. The [...] Read more.
Different types of Ag/AgCl reference electrodes have been realised by means of thin- and thick-film technique. For inner electrolyte, KCl-containing membranes have been deposited and different coatings have been used to protect the reference electrode from a fast leaching out of KCl. The stability of the potential of the reference electrodes without KClcontaining membranes in 3 M KCl was about 7 hours for thin-film electrodes and up to 90 hours for thick-film electrodes. The reference electrodes with membrane were stable for more than two months. The thick-film reference electrode was integrated with a thin-film pH sensor onto one chip and the system pH sensor/reference electrode was investigated by means of capacitance/voltage (C/V) and constant capacitance (ConCap) mode. Full article
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12 pages, 1101 KiB  
Article
A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO2 / LPCVD-Si3N4 Double Layer as pH Transducer
by Michael J. Schöning, Anette Simonis, Christian Ruge, Holger Ecken, Mattea Müller-Veggian and Hans Lüth
Sensors 2002, 2(1), 11-22; https://doi.org/10.3390/s20100011 - 15 Jan 2002
Cited by 43 | Viewed by 11882
Abstract
Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO2 was thermally [...] Read more.
Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO2 was thermally grown on the top of the porous silicon as an insulating layer and Si3N4 was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode. Full article
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10 pages, 544 KiB  
Article
A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference
by Anette Simonis, Thomas Krings, Hans Lüth, Joseph Wang and Michael J. Schöning
Sensors 2001, 1(6), 183-192; https://doi.org/10.3390/s10600183 - 2 Nov 2001
Cited by 24 | Viewed by 13774
Abstract
A reference electrode fabricated by means of thick-film technique is deposited onto a silicon substrate and combined with a thin-film pH sensor to a “hybrid” chip system. To evaluate the suitability of this combination, first investigations were carried out. The characteristics of the [...] Read more.
A reference electrode fabricated by means of thick-film technique is deposited onto a silicon substrate and combined with a thin-film pH sensor to a “hybrid” chip system. To evaluate the suitability of this combination, first investigations were carried out. The characteristics of the thin-film pH sensor were studied towards the thick-film Ag/AgCl reference electrode. Measurements were performed in the capacitance/voltage (C/V) and constant capacitance (Concap) mode for different pH values keeping the concentration of chloride ions constant. No difference of the sensor behaviour could be found when comparing the results to measurements, obtained versus a conventional macroscopic Ag/AgCl reference electrode. Full article
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