Special Issue "Selected Papers from the 1st International Conference of the Chinese Society of Micro/Nano Technology"

Guest Editor
Dr. Xiaohao Wang
Associate Professor, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China
Website: http://yqs.pim.tsinghua.edu.cn/index_e.htm
E-Mail: xhwang@mail.tsinghua.edu.cn
Phone: Tel.: +86-10-62796217

Summary

The 1st International Conference of the Chinese Society of Micro/Nano Technology

The 1st International Conference of the Chinese Society of Micro/Nano Technology was held in Beijing, China on November 19-21, 2008. The conference brought together top researchers from around the world to exchange research results and address open issues in all aspects of micro/nano technology. This special issue collects best papers from more than 300 contributions.

Submission

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All papers should be submitted to sensors@mdpi.com with copy to the guest editors. To be published continuously until the deadline and papers will be listed together at the special websites.

Please visit the Instructions for Authors page before submitting a paper. Open Access publication fees are 1050 CHF per paper. English correction fees (250 CHF) will be added in certain cases (1300 CHF per paper for those papers that require extensive additional formatting and/or English corrections.).

Micro/Nano Technology

Submitted Papers

Title: Orientation Effects in Ballistic High-Strained P-type Si Nanowire FETs
Authors: Jia-Hong Zhang, Qing-An Huang*, Hong Yu and Shuang-Ying Lei
Abstract: In order to design and optimize high-sensitivity nanowire field effect transistor (FET) pressure sensors, this paper investigates the effects of channel orientations and the uniaxial stress on the ballistic hole transport properties of the silicon nanowire (SiNW) FETs placed near the high stress regions of the pressure sensors by using a discrete stressdependent k.p method for subband structure calculation, coupled to a two-dimensional Poisson solver for electrostatics. A semi-classical ballistic FET model is then used to evaluate the ballistic current-voltage characteristics of SiNW FETs with strain and without strain. Our results presented here indicate [110] is the optimum orientation for the p-type SiNW FETs and sensors. For the ultra-scaled cross section SiNW with a 2.2nm diameter, due to the limit of strong quantum confinement, the effect of the stress on the ballistic drive current is too small to be considered, except for the [100] orientation. However, for larger NW transistors with a 5nm diameter with various transport orientations, the uniaxial tensile stress obviously alters the ballistic performance while the uniaxial compressive stress slightly changes the ballistic hole current. Furthermore, the competition of injection velocity and carrier density related to the effective hole masses is found to play a critical role in determining the performance of the nanotransistors.
Keywords: NW FET pressure sensor; orientation; uniaxial stress; ballistic hole transport
Manuscript ID: 59-04

Title: Design of Space Target Detection System Based on a Two-Dimensional Scanning Micro-Mirror
Authors: Chi Zhang *, Gaofei Zhang and Zheng You
Abstract: According to the mission of space detection and measurement, a space target detection system based on a two-dimensional scanning micro-mirror and a laser rangefinder is presented. The micro-mirror is fabricated by MEMS technology and actuated by piezoelectricity. It has two DOF and changes the direction of the emitted laser beam for a regional 2D scanning. The scanning angles are detected by piezoresistors which are integrated in the scanning mirror. The beam reflected from the space target is received by the ranging module. With the contrast between the emitted beam and the reflected beam, the relative range to the space target is calculated by the phase-shift ranging method. With the scanning angles of micro-mirror and the corresponding time of the reflected beam, the relative orientation to the space target is calculated by the orientation module, accordingly. For the target distance up to 10km in the space, the resolution is about 2.4m for ranging while 0.15º in the horizontal direction and 0.22º in the vertical direction for orientation, with a field of view about 20º×20º. The system which can measure the relative position of the space target has great advantages of small volume, low power consumption and high integration. It has a wide application for space target detection and measurement in micro-spacecraft.
Keywords: MOEMS; Micro-mirror; Two-dimensional scanning; Target detection
Manuscript ID: 59-06

Title: Design of Signal Detecting Circuit for High-precision Vacuum Microelectronic Accelerometer
Authors: Dongling Li 1,2,3,4,*, Zhiyu Wen 1,2,3,4, Zhongquan Wen 1,2,3,4 , Yinchuan Yang 1,2,3,4 and Zhengguo Shang 1,2,3,4
Abstract: A novel high-precision vacuum microelectronic accelerometer has been successfully fabricated and tested in our laboratory. This accelerometer has unique advantages of high sensitivity, fast response, anti-radiation and good temperature stability. It is a prototype intended for navigation applications and is required to feature micro-g resolution. This paper briefly describes the structure and working principle of vacuum microelectronic accelerometer, and the mathematical model is built. The performances of the accelerometer system are discussed after Matlab modeling. The results show that by choosing appropriate parameters of signal detecting circuit, the dynamic response of the accelerometer system is significantly improved. The focuses of this paper is the design of signal detecting circuit and its testing results. To ensure good linearity and performance, the closed-loop control mode is adopted. Weak current detection technology is studied, and integral T-style feedback network is used in I/V conversion, which will eliminate highfrequency noise at the front of the circuit. Otherwise, according to the modeling parameters, the low-pass filter is designed. This circuit is simple, reliable, and has high precision. Finally, the testing of vacuum microelectronic accelerometer is done, the results show that the accelerometer exhibits good linearity over -1g to +1 g, the output sensitivity is 543mV/g, and the nonlinearity is 0.94%.
Keywords: Vacuum microelectronic; Accelerometer; Closed-loop control; Weak current detection.
Manuscript ID: 59-07

Title: Optical Correction Using the Method of DMD and PDS
Authors: Yaping Zhang 1,*, Yan Liu 2 and Shuxue Wang 3
Abstract: In order to fully correct the aero-optic distortions created by the mixing/shear layer, window and optical system, creative and effectual correction methods are necessary. Firstly, a method of adaptive optical wavefront correction using the digital micro-mirror device (DMD) based on the Micro-opto-electro-mechanical systems (MOEMS) is presented. Secondly, performance of an adaptive optics system using the Phase Diverse Speckle (PDS) principle is characterized in detail. Through combining the method of DMD with PDS, significant reduction in wavefront phase error is achieved in the experiment. This kind of complex correction principle can be used to recovery the degraded images caused by unforeseen sources. Through the application of this technique, an increased understanding of the correction method and its good performance result can be reached. And the research productions wish to be used to digital holographic wave-front reconstruction.
Keywords: DMD; PDS; AO; optical correction; phase aberrations
Manuscript ID: 59-08

Title: Characteristic Analysis and Experiments of Passive Matrix Addressing for Grating Light Modulator
Authors: Zhu Jin 1,2,*, Zhiyu Wen 1,2, Ning Wang 2 , Zhihai Zhang 1,2, Wei Wie 2 and Shanglian Huang 1,2
Abstract: Grating Light Modulator (GLM) based on Micro-Electro-Mechanical Systems (MEMS) is applied in projection display. Operating principle of GLM is introduced in the paper. Critical factors influencing the performance of passive matrix addressing for GLM are analyzed in detail. Both the response frequency and the driving voltage are relative to the elastic coefficient of GLM. If the elastic coefficient is larger, both response frequency and driving voltage are larger. The operating voltage and the pull-in voltage of device are respectively calculated. It is indicated by analysis that in a m×n array when an all-selected pixel is actuated by a voltage V0, the voltages of half-selected pixel in row and column are respectively V0(m-1)/(m+n-1) and V0(n-1)/(m+n-1), and the voltage of non-selected pixel is V0/(m+n-1). Finally, the experimental results indicate that the operating voltage and the pull-in voltage are respectively 7.8V and 8.5V, which is very approximate to the theoretical values. When GLM is actuated by a 7.8V square-wave voltage with 1kHz frequency, the rising-edge time and the falling-edge time of the intensity response are respectively about 43.64s and 43.24s. The experiments indicate that the response frequency of GLM is about 7kHz. And, the other experiment validates the correctness of crosstalk in a 16×16 GLM array. These experiments provide a theoretical basis for improving the driver of GLM.
Keywords: MEMS; GLM; response frequency; driving voltage; crosstalk
Manuscript ID: 59-10

Title: Fabrication of Hollow Silicon Microneedle Arrays Combining Electrochemical Etching with KOH Etching
Authors: Rui Qi and Ruifeng Yue *
Abstract: This paper presents a novel process for the fabrication of hollow silicon microneedle arrays for transdermal drug delivery. Instead of always using deep reactive ion etching technique to etch through the wafer for the lumen of a hollow needle, the fabrication method consists of two wet etching techniques, one is for forming deep macropore arrays on one side of the wafer based on electrochemical etching in hydrofluoric acid, the other is for making microneedle arrays on the other side of the wafer employing KOH etching. Hollow microneedle arrays with height of 250 μm and spacing of 640 μm have been fabricated.
Keywords: Hollow silicon microneedle arrays; Transdermal drug delivery; Electrochemical etching; KOH etching
Manuscript ID: 59-12

Title: A Label-Free Micro Potentiometric Hemoglobin-A1c Immunosensor Based on Electrochemical Growth of Gold Nanoparticles in Polypyrrole
Authors: Lan Qu, Chao Bian, Jizhou Sun, Jinghong Han and Shanhong Xia *
Abstract: A label-free micro potentiometric hemoglobin-A1c (HbA1c) immunosensor based on electrochemical growth of gold nanoparticles (AuNPs) in polypyrrole (PPy) film is reported. This is a novel method to achieve rapid and label-free differential measurement of HbA1c with micro sensors. A simple and direct method was used to form PPy-AuNPs composite, which enhances antibody immobilization. Morphology study by scanning electron microscopy (SEM) and electrochemical characterization was conducted to characterize the PPy-AuNPs composite film. HbA1c in the concentration of 2 ng/ml can be detected, and the response time was less than 1 min. The immunosensor has potential application in inexpensive portable diabetes control.
Keywords: Immunosensor, MEMS, Hemoglobin-A1c (HbA1c), Polypyrrole (PPy), Gold nanoparticles (AuNP), Field-effect transistor (ISFET)
Manuscript ID: 59-13

Title: A Capacitive Humidity Sensor Based on Multi-wall Carbon Nanotubes
Authors: LIU Xiao-wei 1,2 , ZHAO Zhen-gang 1,*, ZHANG Zhong-xin 1, TAN Xiao-yun 1 and HOU Jue 1
Abstract: A new type of capacitive humidity sensor is introduced in this paper. The sensor consists of two plate electrodes coated with the MWCNTs films and four pieces of isolated medium in 4 corners of the sensor. According to capillary condensation, the capacitance signal of the sensor is sensitive to relative humidity (RH), which could be transformed to voltage signal by a differential capacitance detecting integrated circuit. The sensor is tested using different saturated saline solutions at the ambient temperature of 25, which yielded approximately 11% to 97% RH, respectively. The function of the MWCNTs films, the effect of electrodes distance and the repeatability of the sensor are discussed in this paper and the results demonstrate that this sensor is much sensitive, repeatable and reproducible
Keywords: Capacitive sensor, Humidity sensor, Carbon nanotubes (CNTs), Capillary condensation.
Manuscript ID: 59-17

Title: Preparation and Low-Temperature Crystallization of Silicon Nanorods by Glancing-Angle Deposition
Authors: Ma Yanhong 1, Liu Fengzhen 1,*, Zhu Meifang 1, Liu Jinlong 1,Wang Huan-hua 2,Zhang Zhanjun 1
Abstract: Silicon nanorods were successfully fabricated at low temperatures using radio frequency magnetron sputtering and hot wire chemical vapor deposition with glancing angle incident flux. The influences of the deposition pressure, sputtering power, substrate rotation and hydrogen dilution ratio on the diameter, number density, orientation and crystallization of the Si nanorods were investigated utilizing scanning electron microscopy and Raman scattering. As the sputtering power increases, the number density of Si nanorods decreases and the diameter increases. But the pressure has a contrary effect on the growth of Si nanorods. By combining glancing angle deposition and HWCVD with hydrogen diluted silane as the reaction gases, crystallized Si nanorods with crystalline volume fraction of 0.55 were achieved under a low substrate temperature of 140C.
Keywords: Si nanorods, Glancing angle deposition, Sputtering, HWCVD.
Manuscript ID: 59-18

Title: 4H-SiC Schottky Betavoltaic Micro Battery
Authors: Peng Gao, Xiao-Ying Li* , Da-Yong Qiao, Xian-Wang Yao and Bo Zang
Abstract: The theoretical and experimental study on 4H-SiC Schottky betavoltaic battery was presented in this paper. 4mCi/cm^{2 63}Ni source was used as soft-β radiation source for the 4H-SiC Schottky battery. A type of the battery was fabricated and tested under the illumination of the ⁶³Ni source. The obtained power density was 15.66nW/cm² with an open circuit voltage of 0.5V, a short circuit current density of 3.13×10^-8 A/cm², and a conversion efficiency of 1.3%.
Keywords: Microelectro Mechanical System; Schottky betavoltaic micro battery; 4H-SiC
Manuscript ID: 59-19

Title: A High Isolation Series-shunt RF MEMS Switch
Authors: Yuan-Wei Yu 1, 2, 3,*, Jian Zhu 2, 3, Shi-Xing Jia 3 and Yi Shi 1
Abstract: This paper presents a wide band compact high isolation microelectromechanical systems (MEMS) switch implemented on a coplanar waveguide (CPW) with three ohmic switch cells, which is based on the series-shunt switch design. The ohmic switch shows a low intrinsic loss of 0.1 dB and an isolation of 24.8 dB at 6 GHz. The measured average pull-in voltage is 28 V and switching time is 47 μs. In order to shorten design period of the high isolation switch, a structure-based small-signal model for the 3-port ohmic MEMS switch is developed and parameters are extracted from the measured results. Then a high isolation switch has been developed where each 3-port ohmic MEMS switch is closely located. The agreement of the measured and modeled radio frequency (RF) performance demonstrates the validity of the electrical equivalent model. Measurements of the seriesshunt switch indicate an outstanding isolation of more than 40 dB and a low insertion loss of 0.35 dB from DC to 12 GHz with total chip size of 1 mm×1.2 mm.
Keywords: Series-shunt; RF MEMS switch; Metal-contact; Electrical model
Manuscript ID: 59-20

TitleMEMS Biomimetic Acoustic Pressure Gradient Sensitive Structure for Sound Source Localization
Authors: Peng An *, Weizheng Yuan and Sen Ren
Abstract: Parasitoid fly ormia ochracea shows an astonishing localization ability with its tiny hearing organ. A novel MEMS biomimetic acoustic pressure gradient sensitive structure was designed by mimicking the mechanically coupled tympanums of the fly. Firstly, the analytic representation formulas of the resultant force and resultant moment of the incoming plane wave acting on the structure were derived. After that, structure modal analysis was performed and the results show that the structure has out-of-phase and inphase vibration modes, and the corresponding eigenfrequency is decided by the stiffness of vertical torsional beam and horizontal beam respectively. Acoustic-structural coupled analysis was performed and the results show that phase difference and amplitude difference between the responses of the two square diaphragms of the sensitive structure are effectively enlarged through mechanical coupling beam. The phase difference and amplitude difference increase with increasing incident angle and can be used to distinguish the direction of sound arrival. At last, the fabrication process of the device is also presented.
Keywords: MEMS, Biomimetic, Parasitoid fly, Pressure gradient, Sound source localization
Manuscript ID: 59-22

Title: Using Microcontact Printing to Pattern the Proteins on Glass
Surface
AuthorsFang Ye, Weizheng Yuan and Li Xie
Abstract: A method for microcontact printing Col-protein solutions onto glass surfaces is described in this paper. The stamp master was fabricated using standard photolithography. To increase the hydrophobic property of PDMS, the surface of PDMS stamp was under O₂ plasma treatment. After the plasma treatment, stamps were coated with aqueous Col-protein solution and then placed in direct contact with glass substrates. This process resulted in well defined Col- micropatterns on the surface when printing was performed within 60s under the contact pressure of 50 g/cm².
Keywords: Microcontact printing, Col-Ⅰprotein, Oxygen plasma, Polydimethylsiloxane, Glass surface
Manuscript ID: 59-23

Title: Fabrication and Measurement of a Novel NEMS Resonator
Authors: Shijie Wu, Hong Yu *, Hongfei Li and Lei Yang
Abstract: A process for fabricating NEMS resonators by using silicon on insulator is introduced. Resonators are designed in two types, doubly-clamped beam and H-type beam. The dimensions of beam resonator are ranged from 180nm to 3μm in width , 8μm to 20μm in length, and 200nm in thickness. The mechanical properties of NEMS resonators are studied experimentally. Experimental results show that the fundamental resonant frequencies of these resonators are from several MHz to 20 MHz, and Q factor can be as high as 6,000. The resonance frequencies of two types of nano-beams decrease with the beam length increasing.
Keywords: NEMS; Resonator; Fabrication; Measurement; Dynamic characteristics.
Manuscript ID: 59-24

Title: Mechanical-Thermal Noise on Drive-Mode of the Silicon Micro-Gyroscope
Authors: Bo Yang *, Shourong Wang, Hongsheng Li and Bailing Zhou
College of Instrument Science & Engineering, Southeast University, Nanjing 210096, China; E-mail:yangbo20022002@163.com; srwang@seu.edu.cn; hsli@seu.edu.cn; zhoubailing@seu. edu. cn.
* Author to whom correspondence should be addressed; E-mail:yangbo20022002@163.com; Tel.: +086-25-83791150; Fax: +086-25-83793644
Abstract: A new closed-loop drive scheme which decouples the phase and the gain of the closed-loop driving system is designed in the Silicon Micro-Gyroscope(SMG). We deduce the system model of the closed-loop driving and use stochastic averaging to obtain an approximate “slow” system that clarifies the effect of thermal noise. The effects of mechanical-thermal noise on driving performance of the Silicon Micro-Gyroscope (SMG)， including the noise spectral density of the driving amplitude and frequency, is derived. By calculating and comparing the noise amplitude due to thermal noise both in the opened-loop driving and in the closed-loop driving, we find that the closed-loop driving does not reduce the RMS noise amplitude. We observe the RMS noise frequency can be reduced by increasing the quality factor and the drive amplitude in the closed-loop driving system. The experiment and simulation validate the feasibility of closed-loop driving and confirm the validity of the averaged equation and its stable criterion. The experiment and simulation results indicate the electrical noise of closed-loop driving circuitry is bigger than the mechanical-thermal noise and with the driving mass decreasing, the mechanical-thermal noise may get bigger than the electrical noise of closed-loop driving circuitry.
Keywords: Silicon Micro-Gyroscope(SMG); drive-mode; thermal Noise; stochastic averaging
Manuscript ID: 59-26

Title: Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH
Authors: Rong Lu 1,2, Yanhong Wu 1, Haitao Chen 1,2, Heng Yang 1*, Xinxin Li 1 and Yuelin Wang 1
1 State Key Laboratory of Transducer Technology , Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Yishan Road 800, Shanghai , CHINA
2 Graduate School of the Chinese Academy of Sciences , Beijing 100039 , China
* Author to whom correspondence should be addressed; Email address: h.yang@mail.sim.ac.cn, Tel.: +86-21-54263338-207; Fax: +86-21-64852905
Abstract: A novel method has been developed to fabricate very thin beams with galvanic etch stop for Si in TMAH. The different Au:Si area ratios before and after the release of the beam are used to trigger the etch stop to fabricate very thin single crystal Si beams in normal Si wafers. The thickness of the beams are determining by shallow dry etching before TMAH etching and can be controlled precisely. Beams with submicron thickness have been fabricated in normal (111) wafers. It has been verified by a series of experiments that the beams were formed by galvanic etch stop.
Keywords: galvanic etch stop; nano beam; TMAH.
Manuscript ID: 59-27

Title: Design and Fabrication of a MEMS Flow Sensor and its Application in Precise Liquid Dispensing
Authors: Yaxin Liu*, Liguo Chen and Lining Sun
State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, CHINA
E-Mails:liuyaxin@hit.edu.cn; clg@hit.edu.cn; lnsun@hit.edu.cn
* Author to whom correspondence should be addressed; Tel.: +86-0451-86414462; Fax: +86-0451-86412706
Abstract: A high speed MEMS flow sensor was proposed to enhance the reliability and accuracy of liquid dispensing system. The sensor measures micro-fluidic flow by measuring the pressure difference across a channel, and the channel is etched on the backside of two silicon piezoresistive pressure sensors by using double lever mask technique. Dimensions of the micro-flow channel and two pressure sensors have been designed properly to meet the static and dynamic requirements of the liquid dispensing system. Experiments results show that the full scale (FS) flow measurement ranges up to 80 μl/s with a non-linearity better than 0.51% FS. Benefiting from the feedback of sensor information, the system can self-adjust the open time of the solenoid vale via a closed-loop fuzzy control strategy for desired reagent volume. And besides, the air bubbles or nozzle clogs can be detected in real time. This paper focuses on the design, fabrication and applications of this flow sensor.
Keywords: Flow sensor; MEMS; Liquid dispensing
Manuscript ID: 59-28

Title: A Peristaltic Micro Pump Driven by a Rotating Motor with Magnetically Attracted Steel Balls
Authors: Min Du，Xiongying Ye*，Kang Wu and Zhaoying Zhou
Tsinghua University, Department of precision instrument and mechanology, State Key Laboratory of Precision Measurement Technology and Instruments, Beijing 100084, P.R. China
E-Mails: dum07@mails.tsinghua.edu.cn (M. Du); wuk05@mails.tsinghua.edu.cn (K. Wu); zhouzy@mail.tsinghua.edu.cn (Z. Y. Zhou)
* Author to whom correspondence should be addressed; Tel.: +86-10-62793166; Fax: +86-10-62771478; E-mail: xyye@mail.tsinghua.edu.cn
Abstract: In this paper, we design and fabricate a membrane peristaltic micro pump driven by a rotating motor with magnetically attracted steel balls for lab-on-a-chip. The fabrication process is based on the standard soft lithography technology and bonding of PDMS layer with PMMA substrate. A maximum pumping rate of about 490 μL/min and back pressure of 592 Pa are gained at the rotate speed of 43 rpm. Flow rates are easily adjustable by changing working voltage of DC motor or using steel balls with different diameters. Nevertheless, the micro pump can also work in high speed mode. Higher back pressure up to 10 kPa can be gained with 500 rpm using a high speed DC motor.
Keywords: micropump, microfluidics, PDMS, lab-on-a-chip, soft lithography
Manuscript ID: 59-29

Title: Analysis of A Novel MOEMS Near-Infrared Spectromonitor
Authors: Wei Wei 1,2,*, Shanglian Huang 1,2, Yong Zhu 1,2, Ning Wang 1,2, Zhu Jin 1,2,Jie Zhang 1,2 and Weimin Chen 1,2
1 Key Lab of Opto-electronic Technology and Systems, Education Ministry of China, Chongqing, 400044, China
2 Optoelectronic Engineering Department, Chongqing University, Chongqing, 400044, China
E-Mails:cqwei2000@hotmail.com(W.W.);slhuang@cqu.edu.cn(S.H.);yongzhu@cqu.edu.cn; wn1983@163.com(N.W.);jinzhu_0323@sina.com(Z.J.);zhangjie@cqu.edu.cn(J.Z.); wmchen@cqu.edu.cn(W.C.)
* Author to whom correspondence should be addressed. E-Mails: cqwei2000@hotmail.com(W.W.)
Abstract: A novel near-infrared spectromonitor based on MOEMS grating light modulators is proposed. It has two advantageous characteristics: One is that the compact disc has been utilized as a diffraction grating; the other is that a new spectrum detection method that combined MOEMS grating light modulators with a single infrared detector has been applied. Optics theory has been used to analyze the essential principle of the instrument and the optical characteristics of the key optical components. Then the grating light modulators have been designed and fabricated. Finally, the principle of this spectromonitor was validated and the basic parameters of this spectrum detection system were tested by experiments. The result shows the resolving power is better than 10nm, the wavelength deviation is below 1nm, the deviation of the intensity of peak wavelength is no more than 0.5%, the driving voltage of GLM is below 25V and the response frequency is about 5 kHz. With low cost, high precision, portable and other advantages, the spectromonitor will have a widespread application in bio-chemical analysis field.
Keywords: Near-infrared, MOEMS, Spectromonitor, Grating light modulator, CD-R
Manuscript ID: 59-31

Title: MEMS-Based Micro Solid State Drag Force Wind Sensor
Authors: Lidong Du 1,2，Zhan Zhao 1,*，Cheng Pang 1,2，Zhen Fang 1，Yonghong Liu 1,2
1 State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, 100190, China
2 Graduate University of Chinese Academy of Sciences Beijing, 100190, China
* Author to whom correspondence should be addressed; E-Mails:zhaozhan@mail.ie.ac.cn; Tel.: +86-010-58887186; Fax: +86-010-58887186
Abstract: A drag force micro solid state wind flow sensor is presented in this paper. It includes two perpendicularly encapsulating cells each of which is used to measure the wind velocity and has a thin silicon plate and two short cantilevers which connect with the plate and silicon substrate. The wind velocity can be obtained by measuring the strain of cantilevers by Platinum resistors which are designed into two types: one Pt resistor per cantilever or two perpendicular Pt resistors per cantilever. The wind direction can be measured by perpendicularly encapsulating the two cells. The results suggest the single cell is capable of high sensitivity 60μv/ (m/s) when the input voltage is 0.5V and the linearity of wind direction measurement is less than 6%.
Keywords: Wind Velocity and Direction Sensor; MEMS; Drag Force; ANSYS.
Manuscript ID: 59-