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MEMS Biomimetic Acoustic Pressure Gradient Sensitive Structure for Sound Source Localization
Micro and Nano Electro Mechanical System Laboratory, Northwestern Polytechnical University, Xi’an City, Shaanxi Province, 710072, China
* Author to whom correspondence should be addressed.
Received: 14 May 2009; in revised form: 17 June 2009 / Accepted: 6 July 2009 / Published: 15 July 2009
Abstract: The parasitoid fly Ormia ochracea shows an astonishing localization ability with its tiny hearing organ. A novel MEMS biomimetic acoustic pressure gradient sensitive structure was designed and fabricated by mimicking the mechanically coupled tympana of the fly. Firstly, the analytic representation formulas of the resultant force and resultant moment of the incoming plane wave acting on the structure were derived. After that, structure modal analysis was performed and the results show that the structure has out-of-phase and in-phase vibration modes, and the corresponding eigenfrequency is decided by the stiffness of vertical torsional beam and horizontal beam respectively. Acoustic-structural coupled analysis was performed and the results show that phase difference and amplitude difference between the responses of the two square diaphragms of the sensitive structure are effectively enlarged through mechanical coupling beam. The phase difference and amplitude difference increase with increasing incident angle and can be used to distinguish the direction of sound arrival. At last, the fabrication process and results of the device is also presented.
Keywords: MEMS; biomimetic; parasitoid fly; pressure gradient; sound source localization
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MDPI and ACS Style
An, P.; Yuan, W.; Ren, S. MEMS Biomimetic Acoustic Pressure Gradient Sensitive Structure for Sound Source Localization. Sensors 2009, 9, 5637-5648.
An P, Yuan W, Ren S. MEMS Biomimetic Acoustic Pressure Gradient Sensitive Structure for Sound Source Localization. Sensors. 2009; 9(7):5637-5648.
An, Peng; Yuan, Weizheng; Ren, Sen. 2009. "MEMS Biomimetic Acoustic Pressure Gradient Sensitive Structure for Sound Source Localization." Sensors 9, no. 7: 5637-5648.