Next Article in Journal
Gram-Negative Bacterial Sensors for Eukaryotic Signal Molecules
Next Article in Special Issue
Preparation of a Nanosized As2O3/Mn0.5Zn0.5Fe2O4 Complex and Its Anti-Tumor Effect on Hepatocellular Carcinoma Cells
Previous Article in Journal
Silver(I) Ions Ultrasensitive Detection at Carbon Electrodes―Analysis of Waters, Tobacco Cells and Fish Tissues
Previous Article in Special Issue
Research of DOA Estimation Based on Single MEMS Vector Hydrophone
Sensors 2009, 9(9), 6951-6966; doi:10.3390/s90906951

Design and Analyses of a MEMS Based Resonant Magnetometer

* , * ,
Received: 2 July 2009; in revised form: 18 July 2009 / Accepted: 27 July 2009 / Published: 2 September 2009
View Full-Text   |   Download PDF [910 KB, uploaded 21 June 2014]   |   Browse Figures
Abstract: A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor’s vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the air damping effect is estimated. The test results of the prototype are in accordance with the simulation results of the designed model. The resolution of the magnetometer can reach 30 nT. The test results indicate its sensitivity of more than 400 mV/μT when operating in a 10 Pa vacuum environment.
Keywords: magnetometer; MEMS; capacitance; Lorentz force; simulation magnetometer; MEMS; capacitance; Lorentz force; simulation
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Export to BibTeX |

MDPI and ACS Style

Ren, D.; Wu, L.; Yan, M.; Cui, M.; You, Z.; Hu, M. Design and Analyses of a MEMS Based Resonant Magnetometer. Sensors 2009, 9, 6951-6966.

AMA Style

Ren D, Wu L, Yan M, Cui M, You Z, Hu M. Design and Analyses of a MEMS Based Resonant Magnetometer. Sensors. 2009; 9(9):6951-6966.

Chicago/Turabian Style

Ren, Dahai; Wu, Lingqi; Yan, Meizhi; Cui, Mingyang; You, Zheng; Hu, Muzhi. 2009. "Design and Analyses of a MEMS Based Resonant Magnetometer." Sensors 9, no. 9: 6951-6966.

Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert