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Sensors 2009, 9(6), 4586-4605; doi:10.3390/s90604586
Article
Development of a Prototype Miniature Silicon Microgyroscope
School of Instrument Science and Engineering, Southeast University, Nanjing City, Jiangsu Province, 210096, China
* Author to whom correspondence should be addressed.
Received: 22 April 2009; in revised form: 25 May 2009 / Accepted: 4 June 2009 / Published: 11 June 2009
(This article belongs to the Special Issue Selected Papers from the 1st International Conference of the Chinese Society of Micro/Nano Technology)
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Abstract: A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control (AGC) loop based on electrostatic force feedback is adopted in drive mode, while, dual-channel decomposition and reconstruction closed loops are applied in sense mode. Moreover, the temperature effect on its zero bias was characterized experimentally and a practical compensation method is given. The testing results demonstrate that the useful signal and quadrature signal will not interact with each other because their phases are decoupled. Under a scale factor condition of 9.6 mV/o/s, in full measurement range of ± 300 deg/s, the zero bias stability reaches 15o/h with worse-case nonlinearity of 400 ppm, and the temperature variation trend of the SMG bias is thus largely eliminated, so that the maximum bias value is reduced to one tenth of the original after compensation from -40 oC to 80 oC.
Keywords: silicon microgyroscope (SMG); self-oscillating; dual-channel closed-loop; scale factor; zero bias stability; temperature compensation; miniature prototype
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MDPI and ACS Style
Xia, D.; Chen, S.; Wang, S. Development of a Prototype Miniature Silicon Microgyroscope. Sensors 2009, 9, 4586-4605.
AMA StyleXia D, Chen S, Wang S. Development of a Prototype Miniature Silicon Microgyroscope. Sensors. 2009; 9(6):4586-4605.
Chicago/Turabian StyleXia, Dunzhu; Chen, Shuling; Wang, Shourong. 2009. "Development of a Prototype Miniature Silicon Microgyroscope." Sensors 9, no. 6: 4586-4605.