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Sensors 2009, 9(6), 4586-4605; doi:10.3390/s90604586

Development of a Prototype Miniature Silicon Microgyroscope

School of Instrument Science and Engineering, Southeast University, Nanjing City, Jiangsu Province, 210096, China
Author to whom correspondence should be addressed.
Received: 22 April 2009 / Revised: 25 May 2009 / Accepted: 4 June 2009 / Published: 11 June 2009
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A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control (AGC) loop based on electrostatic force feedback is adopted in drive mode, while, dual-channel decomposition and reconstruction closed loops are applied in sense mode. Moreover, the temperature effect on its zero bias was characterized experimentally and a practical compensation method is given. The testing results demonstrate that the useful signal and quadrature signal will not interact with each other because their phases are decoupled. Under a scale factor condition of 9.6 mV/o/s, in full measurement range of ± 300 deg/s, the zero bias stability reaches 15o/h with worse-case nonlinearity of 400 ppm, and the temperature variation trend of the SMG bias is thus largely eliminated, so that the maximum bias value is reduced to one tenth of the original after compensation from -40 oC to 80 oC. View Full-Text
Keywords: silicon microgyroscope (SMG); self-oscillating; dual-channel closed-loop; scale factor; zero bias stability; temperature compensation; miniature prototype silicon microgyroscope (SMG); self-oscillating; dual-channel closed-loop; scale factor; zero bias stability; temperature compensation; miniature prototype

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Xia, D.; Chen, S.; Wang, S. Development of a Prototype Miniature Silicon Microgyroscope. Sensors 2009, 9, 4586-4605.

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