Sensors 2009, 9(6), 4104-4118; doi:10.3390/s90604104
Article

Synthesis of the System Modeling and Signal Detecting Circuit of a Novel Vacuum Microelectronic Accelerometer

1, 2, 3,* email, 1, 2, 3email, 1, 2, 3email, 1, 2, 3, 1, 2, 3email and 1, 2, 3email
1 Key National Lab of Novel Micro/Nano Devices and System Technology, Chongqing 400030, China 2 National Center for International Research of Micro/Nano System and New Materials Technologies, Chongqing 400030, China 3 Microsystem Research Center, and College of Optoelectronic Engineering Chongqing University, Chongqing 400030, China
* Author to whom correspondence should be addressed.
Received: 5 May 2009; in revised form: 15 May 2009 / Accepted: 22 May 2009 / Published: 27 May 2009
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Abstract: A novel high-precision vacuum microelectronic accelerometer has been successfully fabricated and tested in our laboratory. This accelerometer has unique advantages of high sensitivity, fast response, and anti-radiation stability. It is a prototype intended for navigation applications and is required to feature micro-g resolution. This paper briefly describes the structure and working principle of our vacuum microelectronic accelerometer, and the mathematical model is also established. The performances of the accelerometer system are discussed after Matlab modeling. The results show that, the dynamic response of the accelerometer system is significantly improved by choosing appropriate parameters of signal detecting circuit, and the signal detecting circuit is designed. In order to attain good linearity and performance, the closed-loop control mode is adopted. Weak current detection technology is studied, and integral T-style feedback network is used in I/V conversion, which will eliminate high-frequency noise at the front of the circuit. According to the modeling parameters, the low-pass filter is designed. This circuit is simple, reliable, and has high precision. Experiments are done and the results show that the vacuum microelectronic accelerometer exhibits good linearity over -1 g to +1 g, an output sensitivity of 543 mV/g, and a nonlinearity of 0.94 %.
Keywords: vacuum microelectronics; accelerometer; closed-loop control; weak current detection

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MDPI and ACS Style

Li, D.; Wen, Z.; Wen, Z.; He, X.; Yang, Y.; Shang, Z. Synthesis of the System Modeling and Signal Detecting Circuit of a Novel Vacuum Microelectronic Accelerometer. Sensors 2009, 9, 4104-4118.

AMA Style

Li D, Wen Z, Wen Z, He X, Yang Y, Shang Z. Synthesis of the System Modeling and Signal Detecting Circuit of a Novel Vacuum Microelectronic Accelerometer. Sensors. 2009; 9(6):4104-4118.

Chicago/Turabian Style

Li, Dongling; Wen, Zhiyu; Wen, Zhongquan; He, Xuefeng; Yang, Yinchuan; Shang, Zhengguo. 2009. "Synthesis of the System Modeling and Signal Detecting Circuit of a Novel Vacuum Microelectronic Accelerometer." Sensors 9, no. 6: 4104-4118.

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